Polymer-based single-microring biosensors usually have a small free spectral range (FSR) that hampers the tracing of the spectrum shifting in the measurement. A cascade of two microring resonators based on the Vernier effect, is applied in this article in order to make up for this defect. A small FSR difference between the reference microring and the sensing microring is designed, in order to superpose the periodic envelope signal onto the constituent peaks, which makes it possible to continuously track the spectrum of the sensor. The optical polymer material, Ormocore, which has a large transparent window, is used in the fabrication. The biosensor is fabricated by using an UV-based soft imprint technique, which is considered to be cost-effective and suitable for mass production. By optimizing the volume ratio of Ormocore and the maT thinner, the device can be fabricated almost without a residual layer. The device works at a wavelength of 840 nm, where water absorption loss is much lower than at the infrared wavelengths. A two-step fitting method, including single-peak fitting and whole-envelope fitting, is applied in order to trace the spectral shift accurately. Finally, the two-cascaded-microrings biosensor is characterized, and the obtained FSR is 4.6 nm, which is 16 times larger than the FSR of the single microring biosensor demonstrated in our previous work. Moreover, the sensitivity can also be amplified by 16-fold, thanks to the Vernier effect.
Cascaded-Microrings Biosensors Fabricated on a Polymer Platform
