Developments in large-area flat panel photodetectors with ALD glass capillary array microchannel plates

Author(s):  
Camden Ertley ◽  
Alexey V. Lyashenko ◽  
Bernhard W. Adams ◽  
Till Cremer ◽  
Michael J. Minot ◽  
...  
2011 ◽  
Vol 1303 ◽  
Author(s):  
Seon Woo Lee ◽  
Qing Peng ◽  
Anil U. Mane ◽  
Jeffrey W. Elam ◽  
Karen Byrum ◽  
...  

ABSTRACTAnodized Aluminum Oxide (AAO) based micro-channel plates (MCP) are fabricated in order to develop economical large-area photodetectors. Commercially available glass capillary array has a limitation to reach channel diameter below ~10 microns. However, smaller channel diameter is desired for better spatial and fast timing resolution. AAO based MCP is a good candidate to produce channel diameter less than 10 um by taking advantage of the nano-scale intrinsic pores during etching process. In this study, various channel diameters are fabricated with use of lithographic patterning techniques and wet etching; and characterized with optical, atomic force, and scanning electron microscopies. The channel diameter, channel length and related aspect ratio, as well as the open area are varied in order to maximize the MCP photon amplification.


Author(s):  
O. H. W. Siegmund ◽  
C. D. Ertley ◽  
S. R. Jelinsky ◽  
J. B. McPhate ◽  
J. Tedesco ◽  
...  

2011 ◽  
Vol 19 (1) ◽  
pp. 129-131 ◽  
Author(s):  
M. I. Mazuritskiy

Here, soft X-ray synchrotron radiation transmitted through microchannel plates is studied experimentally. Fine structures of reflection and XANES SiL-edge spectra detected on the exit of silicon glass microcapillary structures under conditions of total X-ray reflection are presented and analyzed. The phenomenon of the interaction of channeling radiation with unoccupied electronic states and propagation of X-ray fluorescence excited in the microchannels is revealed. Investigations of the interaction of monochromatic radiation with the inner-shell capillary surface and propagation of fluorescence radiation through hollow glass capillary waveguides contribute to the development of novel X-ray focusing devices in the future.


2004 ◽  
Author(s):  
Katsumi Suzuki ◽  
Shigeyuki Ikeda ◽  
Ken Ueda ◽  
Tadashi Nakamura ◽  
Masakazu Okabe ◽  
...  

2014 ◽  
Vol 9 (11) ◽  
pp. P11011-P11011 ◽  
Author(s):  
X Wang ◽  
S U Setru ◽  
J Xie ◽  
A Mane ◽  
M Demarteau ◽  
...  

2003 ◽  
Author(s):  
Shigeyuki Ikeda ◽  
Katsumi Suzuki ◽  
Ken Ishikawa ◽  
Richard E. Colbeth ◽  
Chris Webb ◽  
...  

In this chapter, the progress of the development of glass capillary plates is described. In some applications, capillary plates have advantages over GEM or other gaseous detectors. For example, they are compatible with vacuum technology allowing them to be used in sealed gaseous detectors. Prototypes of capillary plates combined with photocathodes sensitive to ultraviolet and visible light were the first to be developed and successfully tested. These detectors resemble vacuum imaging microchannel plates, widely used in many applications. However, the glass capillary plates operate in gas atmosphere and in avalanche mode. This offers a possibility to build large area position-sensitive photomultipliers since at atmospheric pressure there are no serious mechanical constrains on the window. Since glass has a high density, the capillary plate can also be used as efficient convertors of X-rays, and be used at the same time as a multiplication structure for the created primary electrons. Such a device is attractive for X-ray and gamma ray imaging and the first successful tests of a prototype of such a detector are described.


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