High-resolution transmission electron microscopy must attain utmost accuracy in the alignment of incident beam direction and in astigmatism correction, and that, in the shortest possible time. As a method to eliminate this troublesome work, an automatic alignment system using the Slow-Scan CCD camera has been introduced recently. In this method, diffractograms of amorphous images are calculated and analyzed to detect misalignment and astigmatism automatically. In the present study, we also examined diffractogram analysis using a personal computer and digitized TV images, and found that TV images provided enough quality for the on-line alignment procedure of high-resolution work in TEM. Fig. 1 shows a block diagram of our system. The averaged image is digitized by a TV board and is transported to a computer memory, then a diffractogram is calculated using an FFT board, and the feedback parameters which are determined by diffractogram analysis are sent to the microscope(JEM- 2010) through the RS232C interface. The on-line correction system has the following three modes.
Focus calibration method based on the illumination beam scanning angle modulation in a grating alignment system