High precision roundness measurement with two chromatic confocal sensors

2021 ◽  
Author(s):  
Yingzuo Wang ◽  
Jiao Bai ◽  
Guangyao Huang ◽  
Qian Zhou ◽  
Xiaohao Wang ◽  
...  
2012 ◽  
Vol 523-524 ◽  
pp. 883-888 ◽  
Author(s):  
Takeshi Hagino ◽  
Yuichiro Yokoyama ◽  
Yutaka Kuriyama ◽  
Han Haitjema

A newly developed practical sphericity measurement system by means of stitching interferometry is described in this paper. Spheres are widely used in industry. In particular, spheres with stem are usually used in metrological applications such as reference sphere for Coordinate Measuring Machines. It is common to calibrate form of spheres with tactile roundness measurement, however a comprehensive form measurement is desired for evolving high precision applications. The developed system consists of commercial base Fizeau type interferometer to capture partial surface areas of sphere and five axes stages to handle sphere with stem. Hence the system is very suitable for measurement of such stemmed spheres. This system yields three dimensional form maps of stitched sphere and peak to valley sphericity. Standard deviation of sphericity value yielded using this system is less than 5 nm in 8 times repetition. Finally, an equatorial profile clipped from stitched sphere shows good agreement with a result of tactile roundness measuring method within 10 nm typically.


2005 ◽  
Vol 16 (3) ◽  
pp. 833-841 ◽  
Author(s):  
Weiqian Zhao ◽  
Jiubin Tan ◽  
Zi Xue ◽  
Shaoliang Fu

2005 ◽  
Vol 295-296 ◽  
pp. 271-276 ◽  
Author(s):  
W.Q. Zhao ◽  
Jiu Bin Tan ◽  
Z. Xue ◽  
Z.D. Feng

In ultra high precision roundness measurement, a high accuracy and high integrated measuring circuit system equipped with inductive sensor are a developing trend. In order to meet the demand, a novel method to improve the accuracy of measuring circuit of amplitude modulation sensor using digital synthesizing, digital phase sensitivity detection (PSD), and digital set average techniques, is presented. The measuring circuit system based on the method is easy to realize and to operate. It can be plugged directly into an ISA Bus slot for use. Experimental results show that the stability of the sensor measuring system that consists of the measuring circuit system and a Taylor inductive sensor reaches nanometer accuracy. The digital measuring circuit of amplitude modulation can not only be applied widely in amplitude modulation measuring circuit for use of inductive sensors to improve the accuracy of the sensor measuring circuit system but also used in the one for use of capacitance sensors and magnetic grating sensors.


2014 ◽  
Vol 1017 ◽  
pp. 669-674
Author(s):  
Hui Zong Lu ◽  
Zhi Wei Wang ◽  
Qian Fa Deng ◽  
Bing Hai Lv ◽  
Fen Fen Zhou ◽  
...  

A dual probe non-contact ball roundness measurement method is presented in this paper. With two probes aligned in opposite directions, the direct measurement of diameter variation can be obtained. The relationships between diameter variation and out of roundness of a precision ball are discussed. Attempts of error separation using multiple measurements are carried out and the eccentricity of ball and spindle axis is measured. Measurement results indicated that other than the spindle radial run out, which is synchronous in nature, there also exists high frequency non-synchronous variations. Such non-synchronous errors can be effectively eliminated with the dual probe arrangement for diameter variation measurement. The measurement results showed that such set up is capable of measuring high precision balls for diameter variation and out of roundness with uncertainty of less than 10nm. Single measurement can be completed in 10 seconds with over 10,000 data points. Faster measurement is possible with improved air bearing spindle. The method is suitable for online application of precision ball diameter variation and out of roundness measurement.


Metrologia ◽  
2015 ◽  
Vol 53 (1A) ◽  
pp. 04002-04002 ◽  
Author(s):  
J Buajarern ◽  
K Naoi ◽  
A Baker ◽  
X Zi ◽  
C-L Tsai ◽  
...  

Metrologia ◽  
2017 ◽  
Vol 54 (1A) ◽  
pp. 04003-04003 ◽  
Author(s):  
Emilio Prieto ◽  
Rafael Muñoz ◽  
Aelio A Arce ◽  
Rob Bergmans ◽  
Gerard Kotte ◽  
...  

Author(s):  
J. C. Russ ◽  
T. Taguchi ◽  
P. M. Peters ◽  
E. Chatfield ◽  
J. C. Russ ◽  
...  

Conventional SAD patterns as obtained in the TEM present difficulties for identification of materials such as asbestiform minerals, although diffraction data is considered to be an important method for making this purpose. The preferred orientation of the fibers and the spotty patterns that are obtained do not readily lend themselves to measurement of the integrated intensity values for each d-spacing, and even the d-spacings may be hard to determine precisely because the true center location for the broken rings requires estimation. We have implemented an automatic method for diffraction pattern measurement to overcome these problems. It automatically locates the center of patterns with high precision, measures the radius of each ring of spots in the pattern, and integrates the density of spots in that ring. The resulting spectrum of intensity vs. radius is then used just as a conventional X-ray diffractometer scan would be, to locate peaks and produce a list of d,I values suitable for search/match comparison to known or expected phases.


Author(s):  
K. Z. Botros ◽  
S. S. Sheinin

The main features of weak beam images of dislocations were first described by Cockayne et al. using calculations of intensity profiles based on the kinematical and two beam dynamical theories. The feature of weak beam images which is of particular interest in this investigation is that intensity profiles exhibit a sharp peak located at a position very close to the position of the dislocation in the crystal. This property of weak beam images of dislocations has an important application in the determination of stacking fault energy of crystals. This can easily be done since the separation of the partial dislocations bounding a stacking fault ribbon can be measured with high precision, assuming of course that the weak beam relationship between the positions of the image and the dislocation is valid. In order to carry out measurements such as these in practice the specimen must be tilted to "good" weak beam diffraction conditions, which implies utilizing high values of the deviation parameter Sg.


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