Hot embossing: a flexible and successful replication technology for polymer MEMS

During hot embossing process of polymer MEMS devices, the parameters such as temperature, pressure and time are important for the duplication precision of patterns. In this work, a novel method of hot embossing lithography for replication of multiple nano bar structure mould was conducted. The effects of hot embossing temperature and pressure on fabrication precision were studied. Linewidth of the pattern on the mould is from 71nm to 980nm. The replicas of nano bar structure were fabricated on the PMMA (polymer methyl methacrylate) layer with silicon substrate. The effects of hot embossing and demoulding temperature on replicating quality were also discussed. Experimental results indicate that higher demoulding temperature help to lessen PMMA leftover and improve the duplication quality. The hot embossing and dmoulding temperature of 110°C～120°C and 60°C～70°C were obtained to produce high quality duplication of multiple nano bar structures. Micro-grating replicas were also fabricated and demonstrated in this paper.

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Hot Embossing Lithography: Release Layer Characterization by Chemical Force Microscopy

MRS Proceedings ◽

10.1557/proc-872-j12.2 ◽

2005 ◽

Vol 872 ◽

Cited By ~ 2

Author(s):

Neil S. Cameron ◽

Arnaud Ott ◽

Hélène Roberge ◽

Teodor Veres

Keyword(s):

Variable Temperature ◽

Saturated Hydrocarbon ◽

Three Dimensional ◽

Hot Embossing ◽

Relative Increase ◽

Force Microscopy ◽

Chemical Force Microscopy ◽

Polymer Adhesion ◽

Successful Replication ◽

Chemical Force

AbstractHot embossing lithography is a powerful method of replicating three-dimensional micro-and nano-structures (see Figure 1) using a stamp that is pressed into a heat-softened polymer resin. Cooling below the glass-transition temperature (Tg) of the polymer cures the motifs and the stamp and substrate are then separated. Successful replication is therefore contingent on interfacial interactions during the embossing phase and most importantly during the separation or release phase. Various organo- and perfluoro-silane release layers have been proposed and studied.We have employed variable temperature chemical force microscopy (VT-CFM) using tips silanized with four different SAMs interacting with a thin-film of poly(cyclic olefin), (PCO). The silanized-tip/polymer interaction was studied over a temperature range spanning the Tg of the PCO (∼373 K). Adhesion between a saturated hydrocarbon-decorated tip (OTS) and PCO was comparatively strong (170 nN) 30 K above the Tg of the polymer. Adhesion among the perfluorinated tips was 20 to 50 nN lower at 373 K with a relative increase in perfluoromethyl groups (w/w).

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Development of Fabrication Process for Large-Displacement Polymer MEMS with Stacked Movable Structures Based on Hot Embossing and Polishing

Journal of The Japan Institute of Electronics Packaging ◽

10.5104/jiep.14.507 ◽

2011 ◽

Vol 14 (6) ◽

pp. 507-512

Author(s):

Satoshi Amaya ◽

Viet Dzung Dao ◽

Susumu Sugiyama

Keyword(s):

Hot Embossing ◽

Fabrication Process ◽

Large Displacement ◽

Polymer Mems

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Influence of Distribution Size of Micro Energy Director Array on Ultrasonic Precise Sealing of Polymer MEMS Device

CONVERTER ◽

10.17762/converter.35 ◽

2021 ◽

pp. 50-58

Author(s):

Miaomiao Zhang

Keyword(s):

Hot Embossing ◽

Wetting Behavior ◽

Mems Device ◽

Energy Director ◽

Polymer Mems

In order to improve the quality and precision of ultrasonic precision sealing of polymer MEMS device, micro energy director array was proposed on the sealing surface of polymer MEMS device, the influence of the distribution size of micro energy director array to ultrasonic precise sealing was studied. Based on the experiment of PMMA micro-pipe sealing, five kinds of micro energy directors with different distribution sizes were made on the sealing surface by hot embossing technique. The method of ultrasonic precise sealing based on efficiency’s feedback was used and the influence of micro energy director array’s distribution size on the quality of ultrasonic sealing was summarized through the observation on the rule of wetting behavior of micro energy director array.

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