Influence of image processing on line-edge roughness in CD-SEM measurement
Study of the acid-diffusion effect on line edge roughness using the edge roughness evaluation method
2002 ◽
Vol 20
(4)
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pp. 1342
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Keyword(s):
On Line
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2013 ◽
Vol 60
(11)
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pp. 3669-3675
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Keyword(s):
2014 ◽
Vol 53
(8)
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pp. 084002
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2007 ◽
Vol 46
(9B)
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pp. 6187-6190
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Keyword(s):
2004 ◽
Vol 43
(6B)
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pp. 3739-3743
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Keyword(s):
2003 ◽
Vol 21
(6)
◽
pp. 3140
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2006 ◽
Vol 83
(4-9)
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pp. 1078-1081
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Keyword(s):
2004 ◽
Vol 75
(3)
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pp. 297-308
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Keyword(s):