A new x-ray metrology for determining cross-sectional profile of semiconductor device pattern

2010 ◽  
Author(s):  
Kazuhiko Omote ◽  
Yoshiyasu Ito ◽  
Yuko Okazaki
Keyword(s):  
Semiconductor Device ◽  
Cross Sectional ◽  
X Ray ◽  
Cross Sectional Profile ◽  
Sectional Profile

X-Ray Replication of Submicrometer Linewidth Patterns

1977 ◽  
Vol 35 ◽  
pp. 136-137
Author(s):  
Henry I. Smith ◽  
D.C. Flanders
Keyword(s):  
Electron Beam Lithography ◽  
Cross Sectional ◽  
X Ray ◽  
Electron Backscattering ◽  
Spatial Frequencies ◽  
Cross Sectional Profile ◽  
Carbon Foils ◽  
Sectional Profile ◽  
And Control ◽  
Soft Radiation

Scanning electron beam lithography has been used for a number of years to write submicrometer linewidth patterns in radiation sensitive films (resist films) on substrates. On semi-infinite substrates, electron backscattering severely limits the exposure latitude and control of cross-sectional profile for patterns having fundamental spatial frequencies below about 4000 Å(l),Recently, STEM'S have been used to write patterns with linewidths below 100 Å. To avoid the detrimental effects of electron backscattering however, the substrates had to be carbon foils about 100 Å thick (2,3). X-ray lithography using the very soft radiation in the range 10 - 50 Å avoids the problem of backscattering and thus permits one to replicate on semi-infinite substrates patterns with linewidths of the order of 1000 Å and less, and in addition provides means for controlling cross-sectional profiles. X-radiation in the range 4-10 Å on the other hand is appropriate for replicating patterns in the linewidth range above about 3000 Å, and thus is most appropriate for microelectronic applications (4 - 6).

Measurement of cross-sectional profile for sub-15nm hp LS patterns in nanoimprint templates using small-angle x-ray scattering

2020 ◽  
Author(s):  
Kazuki Hagihara ◽  
Eiji Yamanaka ◽  
Yoshiyasu Ito ◽  
Kiyoshi Ogata ◽  
Kazuhiko Omote ◽  
...  
Keyword(s):  
Small Angle ◽  
Cross Sectional ◽  
X Ray ◽  
X Ray Scattering ◽  
Cross Sectional Profile ◽  
Sectional Profile ◽  
Ray Scattering

The capability of measuring cross-sectional profile for hole patterns in nanoimprint templates using small-angle x-ray scattering

2017 ◽  
Author(s):  
Kazuki Hagihara ◽  
Rikiya Taniguchi ◽  
Eiji Yamanaka ◽  
Kazuhiko Omote ◽  
Yoshiyasu Ito ◽  
...  
Keyword(s):  
Small Angle ◽  
Cross Sectional ◽  
X Ray ◽  
X Ray Scattering ◽  
Cross Sectional Profile ◽  
Sectional Profile ◽  
Ray Scattering

The capability of measuring cross-sectional profile for hole patterns in nanoimprint templates using small-angle x-ray scattering

2017 ◽  
Author(s):  
Kazuki Hagihara ◽  
Rikiya Taniguchi ◽  
Eiji Yamanaka ◽  
Kazuhiko Omote ◽  
Yoshiyasu Ito ◽  
...  
Keyword(s):  
Small Angle ◽  
Cross Sectional ◽  
X Ray ◽  
X Ray Scattering ◽  
Cross Sectional Profile ◽  
Sectional Profile ◽  
Ray Scattering

scholarly journals Bonding widths of Deposited Polymer Strands in Additive Manufacturing

Materials ◽  
2021 ◽  
Vol 14 (4) ◽  
pp. 871
Author(s):  
Cheng Luo ◽  
Manjarik Mrinal ◽  
Xiang Wang ◽  
Ye Hong
Keyword(s):  
Polymer Melt ◽  
Acrylonitrile Butadiene Styrene ◽  
High Viscosity ◽  
Numerical Results ◽  
Fused Filament Fabrication ◽  
Cross Sectional ◽  
Nozzle Height ◽  
Special Cases ◽  
Cross Sectional Profile ◽  
Sectional Profile

In this study, we explore the deformation of a polymer extrudate upon the deposition on a build platform, to determine the bonding widths between stacked strands in fused-filament fabrication. The considered polymer melt has an extremely high viscosity, which dominates in its deformation. Mainly considering the viscous effect, we derive analytical expressions of the flat width, compressed depth, bonding width and cross-sectional profile of the filament in four special cases, which have different combinations of extrusion speed, print speed and nozzle height. We further validate the derived relations, using our experimental results on acrylonitrile butadiene styrene (ABS), as well as existing experimental and numerical results on ABS and polylactic acid (PLA). Compared with existing theoretical and numerical results, our derived analytic relations are simple, which need less calculations. They can be used to quickly predict the geometries of the deposited strands, including the bonding widths.

Torsional Stiffness of a Thin-Walled Beam Braced by Pinned or Rigidly Fixed Transverse Diaphragms

1973 ◽  
Vol 15 (5) ◽  
pp. 351-356
Author(s):  
T. Harrison ◽  
J. M. Siddall
Keyword(s):  
Experimental Evidence ◽  
Theoretical Work ◽  
Torsional Stiffness ◽  
Cross Sectional ◽  
Cross Sectional Profile ◽  
Thin Walled ◽  
Sectional Profile ◽  
Good Agreement

The torsional stiffness of a thin-walled beam of open cross-sectional profile braced by evenly spaced transverse diaphragms is studied. Diaphragms rigidly fixed or attached by frictionless pins are treated and it is seen that, in either case, the only effect is to modify the St Venant torsional constant for the thin-walled beam. The theoretical work is supported by experimental evidence from two braced perspex channels which simulate the two assumed methods of attaching the diaphragms. Good agreement is demonstrated.

scholarly journals Influence of Geometric Parameters on Aerodynamic and Acoustic Performances of Bladeless Fans

2019 ◽  
Author(s):  
Ang Li ◽  
Jun Chen ◽  
Yangfan Liu ◽  
Stuart Bolton ◽  
Patricia Davies
Keyword(s):  
Cross Section ◽  
Fluid Dynamic ◽  
Geometric Parameters ◽  
Design Stage ◽  
Air Velocity ◽  
Cross Sectional ◽  
Future Design ◽  
Cross Sectional Profile ◽  
The Cross ◽  
Sectional Profile

Abstract In recent years, the bladeless fan that does not have visible impellers have been widely applied in household appliances. Since the customers are particularly sensitive to noise and the strength of wind generated by the fan, the aerodynamic and acoustic performances of the fan need to be accurately characterized in the design stage. In this study, computational fluid dynamic (CFD) and computational aeroacoustics (CAA) are applied to investigate the performances of different designs of a bladeless fan model. The influence of four parameters, namely the airfoil selection for cross-section of the wind channel, the slit width, the height of cross-section and the location of the slit, is investigated. The results indicate the streamwise air velocity increases significantly by narrowing the outlet, but the noise level increases simultaneously. In addition, the generated noise increases while the height of fan cross-section increases, and a 4mm height of the cross section is optimal for aerodynamic performance. When the slit is closer to the location of maximum thickness, the performances of the bladeless fan increases. Moreover, the performance is not changed significantly by changing the cross-sectional profile. Finally, the optimal geometric parameters are identified to guide the future design of the bladeless fan.

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