Highly efficient diffractive beam splitters surface-structured on submicron scale using deep-UV laser interference lithography

The fabrication of large area nanoscale periodic structures on material surfaces for hydrophobicity engineering has been difficult due to the complex processes. Here we propose a two-step fabrication method for periodic nanostructures by combining laser interference lithography (LIL) and reactive ion etching (RIE). Sub-micron periodic nanotip patterns are fabricated in the photoresist by LIL, and then transferred into the silicon substrate using RIE. By measuring the contact angle (CA) of a water droplet on the substrate surface, the wettability of the surface with nanotip structures of various periods is studied. Our experiments show that the nanotip structures fabricated by the combined LIL and RIE process deliver satisfactory hydrophobic tendencies when the periods fall into the submicron scale. When the period of the structure is small enough, the hydrophilicity of the surface can be altered into hydrophobicity. The hydrophobicity achieved by this method is reusable and sustainable with low cost and no composition alteration comparing to chemical methods. The process developed in this work provides potential applications in biosensingand digital fluidics.

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Periodic patterning using multi-facet prism based laser interference lithography

Laser Physics ◽

10.1134/s1054660x09030256 ◽

2009 ◽

Vol 19 (3) ◽

pp. 505-510 ◽

Cited By ~ 5

Author(s):

R. Sidharthan ◽

F. Chollet ◽

V. M. Murukeshan

Keyword(s):

Interference Lithography ◽

Laser Interference Lithography ◽

Laser Interference

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Large Area Photonic Crystal Slabs for Visible Light with Waveguiding Defect Structures: Fabrication with Focused Ion Beam Assisted Laser Interference Lithography

Advanced Materials ◽

10.1002/1521-4095(200110)13:20<1551::aid-adma1551>3.0.co;2-v ◽

2001 ◽

Vol 13 (20) ◽

pp. 1551 ◽

Cited By ~ 52

Author(s):

L. Vogelaar ◽

W. Nijdam ◽

H. A. G. M. van Wolferen ◽

R. M. de Ridder ◽

F. B. Segerink ◽

...

Keyword(s):

Photonic Crystal ◽

Visible Light ◽

Focused Ion Beam ◽

Ion Beam ◽

Interference Lithography ◽

Laser Interference Lithography ◽

Defect Structures ◽

Laser Interference ◽

Large Area ◽

Photonic Crystal Slabs

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Theoretical study of micro-structure fabrication by multi-beam laser interference lithography with different polarization combinations

Modern Physics Letters B ◽

10.1142/s0217984921504595 ◽

2021 ◽

pp. 2150459

Author(s):

Xiangxian Wang ◽

Tianxu Jia ◽

Jiankai Zhu ◽

Yingwen Su ◽

Liping Zhang ◽

...

Keyword(s):

Manufacturing Industry ◽

Structural Parameters ◽

Interference Lithography ◽

Polarization Angle ◽

Laser Interference Lithography ◽

Laser Interference ◽

Micro Structure ◽

Periodic Patterns ◽

Beam Laser ◽

Micro Structures

In this study, we systematically and comprehensively investigated the influence of polarization angle on the fabrication of micro-structures by multi-beam laser interference lithography. Using theoretical analysis and simulation, we studied the effect of different polarization combinations, i.e. transverse electric (TE) and transverse magnetic (TM) polarization combinations, on the characteristics of the micro-structures fabricated by three-, four-, and six-beam laser interference lithography. We successfully obtained micro-structures with different periodic patterns such as honeycomb dots, quasi-elliptic dots, different square dots, and quasi-triangular dots. The simulation results illustrate that polarization affects the formation of interference patterns, pattern contrasts, and periods. The methods discussed herein are simple, low cost, and allow excellent control over structural parameters, and hence are useful for the micro-structure manufacturing industry.

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