Small directional microelectromechanical systems microphone arrays

2013 ◽  
Vol 133 (5) ◽  
pp. 3317-3317
Author(s):  
Gary W. Elko
2010 ◽  
Vol 127 (3) ◽  
pp. 1980-1980
Author(s):  
Katherine E. Knisely ◽  
Victor Singh ◽  
Karl Grosh ◽  
David R. Dowling ◽  
Serdar H. Yonak

2018 ◽  
Vol 2018 ◽  
pp. 1-16 ◽  
Author(s):  
Bruno da Silva ◽  
An Braeken ◽  
Federico Domínguez ◽  
Abdellah Touhafi

The current Microelectromechanical Systems (MEMS) technology enables the deployment of relatively low-cost wireless sensor networks composed of MEMS microphone arrays for accurate sound source localization. However, the evaluation and the selection of the most accurate and power-efficient network’s topology are not trivial when considering dynamic MEMS microphone arrays. Although software simulators are usually considered, they consist of high-computational intensive tasks, which require hours to days to be completed. In this paper, we present an FPGA-based platform to emulate a network of microphone arrays. Our platform provides a controlled simulated acoustic environment, able to evaluate the impact of different network configurations such as the number of microphones per array, the network’s topology, or the used detection method. Data fusion techniques, combining the data collected by each node, are used in this platform. The platform is designed to exploit the FPGA’s partial reconfiguration feature to increase the flexibility of the network emulator as well as to increase performance thanks to the use of the PCI-express high-bandwidth interface. On the one hand, the network emulator presents a higher flexibility by partially reconfiguring the nodes’ architecture in runtime. On the other hand, a set of strategies and heuristics to properly use partial reconfiguration allows the acceleration of the emulation by exploiting the execution parallelism. Several experiments are presented to demonstrate some of the capabilities of our platform and the benefits of using partial reconfiguration.


1996 ◽  
Vol 444 ◽  
Author(s):  
Hyeon-Seag Kim ◽  
D. L. Polla ◽  
S. A. Campbell

AbstractThe electrical reliability properties of PZT (54/46) thin films have been measured for the purpose of integrating this material with silicon-based microelectromechanical systems. Ferroelectric thin films of PZT were prepared by metal organic decomposition. The charge trapping and degradation properties of these thin films were studied through device characteristics such as hysteresis loop, leakage current, fatigue, dielectric constant, capacitancevoltage, and loss factor measurements. Several unique experimental results have been found. Different degradation processes were verified through fatigue (bipolar stress), low and high charge injection (unipolar stress), and high field stressing (unipolar stress).


2006 ◽  
Vol 4 ◽  
pp. 288-305
Author(s):  
A.B. Migranov

The article deals with the issues related to the construction of microelectromechanical systems (MEMS), and the problems arising from their manufacture. Particular attention is paid to micromechanical parts of robot, which were developed by methods of semi-simulation using the virtual environment for designing, testing and debugging MEMS.


2000 ◽  
Vol 19 (4) ◽  
pp. 268-277 ◽  
Author(s):  
CHARLES HAUTAMAKI ◽  
SHAYNE ZURN ◽  
SUSAN C. MANTELL ◽  
DENNIS L. POLLA

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