On the applicability of the optical emission of triplet states of hydrogen molecules for the diagnostics of non-equilibrium microwave hydrogen discharge

2017 ◽  
Vol 55 (4) ◽  
pp. 496-501 ◽  
Author(s):  
V. A. Shakhatov ◽  
Yu. A. Lebedev
1989 ◽  
Vol 165 ◽  
Author(s):  
W. E. Quinn ◽  
B. G. Bagley ◽  
B. J. Wilkens ◽  
B. M. Gallois

AbstractSilicon nitride films deposited from silane-nitrogen and silane-ammonia mixtures by PECVD contain large amounts of hydrogen. We have determined that adding argon to the gas mixture reduces the amount of hydrogen in the resulting films. Differences in film composition are obviously due to changes in the chemistry of the discharge which was characterized by line-of-sight mass spectrometry, optical emission spectroscopy and plasma double probe measurements. Substrate temperature was fixed at 325°C, pressure was 500 mtorr, the RF power was 0.25 watts cm−2, the silane to nitrogen ratio was varied from 0.003 to 0.02, the silane to ammonia ratio was varied from 0.01 to 0.5, and the argon additions were 10% of the total gas flow. Argon additions to the discharge increased the plasma density in both nitrogen and ammonia plasmas. Optical emission from N2 and Si-H species increased upon the addition of 10% argon to the silane-nitrogen discharge, whereas the N-H emission decreased upon addition of argon to the silane-ammonia discharge. Infrared transmission spectra of films deposited with and without argon show no change in peak position or intensity of Si-H and N-H absorption bands in the spectral range studied, despite a large (over 20%) reduction in hydrogen content, as determined by nuclear profiling, upon the addition of argon. These results suggest that a substantial fraction of the hydrogen in the films is not infrared active. We propose that the reduction in hydrogen content is due to bombardment of the growing film by argon ions, which sputter the adsorbed hydrogen molecules.


2013 ◽  
Vol 423-426 ◽  
pp. 537-540 ◽  
Author(s):  
Jun Yan ◽  
Yuki Kondo ◽  
Xiao Yi Qian ◽  
Xiao Meng Fei ◽  
Katsuhiko Hosoi ◽  
...  

A non-equilibrium atmospheric pressure plasma was applied for the polymerization of the methacrylic monomers such as (2-hydroxyethyl methacrylate (HEMA), methacrylic acid (MAA) and butyl methacrylate (BMA)). These monomers were successfully polymerized with retaining the functional groups of ester or acid. The polymerization mechanism was discussed on the basis of the optical emission spectroscopy (OES) of the plasma. It was strongly suggested that the functional groups could be retained in the polymerization proceeds when the HOMO-LUMO gap of the monomer is close to the energy of Ar metastable atom, which initiates the polymerization.


Author(s):  
Michael R. von Spakovsky ◽  
Charles E. Smith ◽  
Vittorio Verda

A typical approach for modeling systems at a nanoscale in states of non-equilibrium undergoing an irreversible process is to use an ad hoc mixture of molecular dynamics (linear and nonlinear), i.e. classical mechanics, coupled to assumptions of stable equilibrium which allow one via analogy to incorporate equilibrium thermodynamic state information such as temperature and pressure into the modeling process. However, such an approach cannot describe the actual thermodynamic evolution in state which occurs in these systems since the equation of motion used (Newton’s second law) can only describe the evolution in state from one mechanical state to another. To capture the actual thermodynamic evolution, a more general equation of motion is needed. Such an equation has been proposed, i.e. the Beretta equation of motion, as part of a general theory, which unifies (not simply bridges as is the case in statistical thermodynamics) quantum mechanics and thermodynamics. It is called the unified quantum theory of mechanics and thermodynamics or quantum thermodynamics. This equation, which strictly satisfies all of the implications of the laws of thermodynamics, including the second law, as well as of quantum mechanics, describes the thermodynamic evolution in state of a system in non-equilibrium regardless of whether or not the system is in a state far from or close to stable equilibrium. This theory and its dynamical postulate are used here to model the storage of hydrogen in an isolated box modeled in 1D and 2D with a carbon atom at one end of the box in 1D and a carbon nanotube in the middle of the box in 2D. The system is prepared in a state with the hydrogen molecules initially far from stable equilibrium, after which the system is allowed to relax (evolve) to a state of stable equilibrium. The so-called energy eigenvalue problem is used to determine the energy eigenlevels and eigenstates of the system, while the nonlinear Beretta equation of motion is used to determine the evolution of the thermodynamic state of the system as well as the spatial distributions of the hydrogen molecules in time. The results of our initial simulations show in detail the trajectory of the state of the system as the hydrogen molecules, which are initially arranged to be far from the carbon atom or the carbon nanotube, are seen to spread out in the container and eventually become more concentrated near the carbon atom or atoms.


2014 ◽  
Vol 670-671 ◽  
pp. 244-248 ◽  
Author(s):  
Jun Yan ◽  
Katsuhiko Hosoi ◽  
Shin-ichi Kuroda

The non-equilibrium atmospheric pressure Ar plasma was applied for the polymerization of maleic anhydride (MA). The deposited films were analyzed by using Fourier transform infrared spectroscopy (FT-IR) proving the monomer was successfully polymerized with retaining the functional groups. The intensity of optical emission spectroscopy (OES) of the plasma jet was found to become weaker when the monomer was introduced into the jet. This was interpreted as the result of the energy transfer from the metastable Ar to the monomer. It was proposed that the excited MA changed into π-π* transition state to produce dimer biradicals which initiate the polymerization.


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