Optical Properties of Aluminum- and Silicon-Nitride Films and Al–Si–N Nanocomposite Coatings Deposited by Reactive Magnetron Sputtering

Journal of Surface Investigation X-ray Synchrotron and Neutron Techniques ◽

10.1134/s1027451021010274 ◽

2021 ◽

Vol 15 (1) ◽

pp. 139-146

Author(s):

F. V. Konusov ◽

S. K. Pavlov ◽

A. L. Lauk ◽

A. V. Kabyshev ◽

R. M. Gadirov

Keyword(s):

Optical Properties ◽

Silicon Nitride ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Nanocomposite Coatings ◽

Reactive Magnetron ◽

Silicon Nitride Films

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Helium‐excited reactive magnetron sputtering for stress‐free silicon nitride films

Applied Physics Letters ◽

10.1063/1.109444 ◽

1993 ◽

Vol 62 (17) ◽

pp. 2116-2118 ◽

Author(s):

Iwao Sugimoto ◽

Satoko Nakano

Keyword(s):

Silicon Nitride ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Silicon Nitride Films ◽

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Reactive magnetron sputtering deposition and columnar growth of nc‐TiC∕a‐C:H nanocomposite coatings

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.2188411 ◽

2006 ◽

Vol 24 (4) ◽

pp. 1441-1447 ◽

Author(s):

D. Galvan ◽

Y. T. Pei ◽

J. Th. M. De Hosson

Keyword(s):

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Nanocomposite Coatings ◽

Reactive Magnetron ◽

Columnar Growth ◽

Sputtering Deposition

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Structure and optical properties of Cd-substituted ZnO (Zn1−x Cd x O) thin films synthesized by the dc reactive magnetron sputtering

Applied Physics A ◽

10.1007/s00339-014-8451-y ◽

2014 ◽

Vol 117 (2) ◽

pp. 895-900 ◽

Author(s):

Jinghai Yang ◽

Yonggao Yue ◽

Yingrui Sui ◽

Yan Cao ◽

Maobin Wei ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Dc Reactive Magnetron Sputtering

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Titanium Nitride - Silicon Nitride Composite Coatings Deposited by Reactive Magnetron Sputtering

Materials Science Forum ◽

10.4028/www.scientific.net/msf.287-288.267 ◽

1998 ◽

Vol 287-288 ◽

pp. 267-268

Author(s):

Jörg Patscheider ◽

M Diserens ◽

F. Lévy

Keyword(s):

Silicon Nitride ◽

Magnetron Sputtering ◽

Titanium Nitride ◽

Composite Coatings ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron

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Comparison of optical properties of TiO2 thin films prepared by reactive magnetron sputtering and electron-beam evaporation techniques

Semiconductor Physics Quantum Electronics & Optoelectronics ◽

10.15407/spqeo14.04.427 ◽

2011 ◽

Vol 14 (4) ◽

pp. 427-431 ◽

Author(s):

V. V. Brus ◽

◽

Keyword(s):

Optical Properties ◽

Electron Beam ◽

Magnetron Sputtering ◽

Electron Beam Evaporation ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Tio2 Thin Films

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Temperature dependence of the optical properties of mixed oxide thin films deposited by reactive magnetron sputtering

10.1117/12.625069 ◽

2005 ◽

Author(s):

M. Vergöhl ◽

B. Hunsche ◽

A. Ritz

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Temperature Dependence ◽

Mixed Oxide ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Oxide Thin Films

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Structural, electrical, and optical properties of F-doped SnO or SnO 2 films prepared by RF reactive magnetron sputtering at different substrate temperatures and O 2 fluxes

Journal of Alloys and Compounds ◽

10.1016/j.jallcom.2017.05.193 ◽

2017 ◽

Vol 719 ◽

pp. 429-437 ◽

Author(s):

B.L. Zhu ◽

X. Zhao ◽

W.C. Hu ◽

T.T. Li ◽

J. Wu ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Electrical And Optical Properties ◽

Substrate Temperatures

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The structural, electrical, and optical properties of SnO2 films prepared by reactive magnetron sputtering: Influence of substrate temperature and O2 flow rate

Materials Chemistry and Physics ◽

10.1016/j.matchemphys.2020.123129 ◽

2020 ◽

Vol 250 ◽

pp. 123129

Author(s):

Ye Tao ◽

Bailin Zhu ◽

Yuting Yang ◽

Jun Wu ◽

Xinwei Shi

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Substrate Temperature ◽

Flow Rate ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Electrical And Optical Properties ◽

Influence Of Substrate

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Electrical and optical properties of tantalum oxide thin films prepared by reactive magnetron sputtering

Journal of Alloys and Compounds ◽

10.1016/j.jallcom.2011.08.019 ◽

2011 ◽

Vol 509 (41) ◽

pp. 9758-9763 ◽

Author(s):

A.X. Wei ◽

Z.X. Ge ◽

X.H. Zhao ◽

J. Liu ◽

Y. Zhao

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Tantalum Oxide ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Oxide Thin Films ◽

Electrical And Optical Properties

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Oxygen amount effect on optical properties of aluminium oxide nanostructured films prepared by reactive magnetron sputtering

Optik ◽

10.1016/j.ijleo.2016.02.007 ◽

2016 ◽

Vol 127 (11) ◽

pp. 4635-4638 ◽

Author(s):

E. Koushki ◽

S.H. Mousavi ◽

J. Baedi

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Aluminium Oxide ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Nanostructured Films ◽

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