It has recently been found that electron beams, of energy typically 100 keV, can damage a very wide range of solids, many of which are normally thought to be stable to electron irradiation. For example, metals, semiconductors and ceramics can all be damaged by electrons having energy less than that required for direct displacement damage. Radiation damage effects are particularly apparent when using intense electron beams from field emission guns in STEM's, TEM's and SEM's, but damage also occurs in materials thought to be stable when using electrons from LaB6, or heated W filaments. Considerable care must therefore be taken in microanalysis, etc, particularly when using field emission guns.If the incident electron beam is focussed to nanometre-scale diameter, then nanometre-scale surface and volume structures (e.g. indentations, holes and lines) can be produced in a variety of specimens. It is also possible to cut a specimen to a desired shape with nanometre precision and to remove surface steps from surfaces, leaving them atomically smooth.