Effect analysis of surface metal layer on step height standard

2021 ◽  
pp. 2140006
Author(s):  
Xiaodong Zhang ◽  
Suoyin Li ◽  
Zhiguo Han ◽  
Lin Zhao ◽  
Yanan Feng ◽  
...  
Keyword(s):  
White Light ◽  
Metal Layer ◽  
Step Height ◽  
Measuring Instrument ◽  
Effect Analysis ◽  
Measurement Capability ◽  
White Light Interferometer ◽  
Surface Metal ◽  
Measuring Machine ◽  
Measurement Deviation

In order to improve the measurement accuracy of the step height measuring instrument, a semiconductor process was used to prepare the step height standard for calibrating the instrument. Aiming at the problem of deviation in the white light interferometer measuring step height standard, the cause of the measurement deviation was theoretically analyzed, combining the optical theory and the principle of instrument. In addition, referring to the semiconductor sputtering process, a method of sputtering metal layer on the surface of the step structure was proposed, and a set of universal step height standards with a nominal value of [Formula: see text] nm were developed for the step height measuring instrument. Finally, the step height standards with the sputtered metal layer were compared and measured, using the white light interferometer and nanometer measuring machine (NMM). The measurement error of the white light interferometer can be effectively controlled within 1%, which is beneficial to verify the measurement capability of the step height measuring instrument.

Study on Spatial Frequency Domain Algorithm and White Light Interference System Based on NMM

2015 ◽  
Vol 738-739 ◽  
pp. 904-910
Author(s):  
Li Jian ◽  
Li Hua Lei ◽  
Dong Sheng Li ◽  
Yun Xia Fu ◽  
Yuan Li ◽  
...  
Keyword(s):  
Spatial Frequency ◽  
Frequency Domain ◽  
White Light ◽  
Three Dimensional ◽  
Step Height ◽  
Light Interference ◽  
Interference System ◽  
Measuring Machine ◽  
White Light Interference ◽  
Spatial Frequency Domain

White light interference technique for topography measurement effectively avoids phase ambiguity in phase-shifting interferometry. The spatial frequency domain algorithm based on scanning white light interference technique has the advantage of insensitivity to noise and higher calculation accuracy compared with other methods. The white light interference sensor is constructed based on nano positioning and nano measuring machine (NMM), the calibrated step height standard of 100±3nm is measured. The spatial frequency domain algorithm is adopted for data processing, the repetitive test result of 97.9nm and standard deviation of 0.48nm are achieved. To verify the measuring ability of complex device, the number ‘242’ on ink box is measured and three-dimensional reconstruction is conducted. The high precision and traceable measurements of micro/nano scale step height standard and complex devices are realized by the white light interference system based on NMM with steady frequency laser interferometer built-in.

White-light interferometer with high sensitivity and resolution using multi-mode fibers

Optik ◽  
2001 ◽  
Vol 112 (6) ◽  
pp. 245-249 ◽  
Author(s):  
Guiju Song ◽  
Xiangzhao Wang ◽  
Zujie Fang
Keyword(s):  
White Light ◽  
High Sensitivity ◽  
White Light Interferometer ◽  
Multi Mode

Comparison of Different Methods for the Evaluation of Cavitation Damaged Surfaces

2005 ◽  
Author(s):  
B. Bachert ◽  
G. Ludwig ◽  
B. Stoffel ◽  
S. Baumgarten
Keyword(s):  
Mass Loss ◽  
White Light ◽  
Cavitation Erosion ◽  
Evaluation Method ◽  
Three Dimensional ◽  
Special Device ◽  
Test Rig ◽  
Rotating Disc ◽  
White Light Interferometer ◽  
Initial Stage

The experimental data which will be presented in this paper are the results of the comparison between different methods for evaluating damaged surfaces by cavitation erosion. The different methods are partly working in the initial stage of cavitation erosion and partly at developed cavitation erosion, where mass loss occurs. The used test rig consists basically of a rotating disc with a diameter of 500 mm on which four holes are located. Each hole generates a cavitation zone while the disc is rotating. The test objects are material specimens made of copper. Copper was used as test material in respect to reasonable durations for the tests. The specimen can be implemented in the casing of the test rig directly across the rotating disc on the diameter where the holes are located. This rotating disc test rig generates a very aggressive type of cavitation, so that mass loss, of course depending on the tested material, will appear after relatively short durations. Also the initial stage of cavitation erosion can be observed. The used test rig is very interesting regarding the possibility to apply different measuring techniques to characterize the erosive aggressiveness of cavitation. These techniques are at first the so-called Pitcount-Method, which allows investigations of cavitation erosion in the initial stage. The second one is an acoustic method, which is based on a structure-borne noise sensor and a specially developed signal processing system. The third method is the measuring of mass loss of the material specimen after several time steps. With the help of a CCD-camera and special digital image processing software, images of different cavitation conditions were recorded. The information obtained from these images should serve as support for the evaluation of the other used methods. After the evaluation with the above mentioned methods, the specimens were evaluated with a special device which works with the help of a white light interferometer. With this evaluation method three-dimensional information can be obtained in respect to the actually eroded volume of the specimens. With this information the lost mass of the specimens could be calculated directly. Especially the comparison of the results obtained from the Pitcount-Method, which is a two-dimensional evaluation method, and the three-dimensional results of the white light interferometer is an important point of the work within this paper.

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