Hydrophobic antireflective coating with high laser damage threshold by physical vapor deposition

Hydrophobic antireflective coating is fabricated by physical vapor deposition. The optical, contact angle and laser damage resistance properties are investigated, respectively. The transmittance of the antireflective coating with hydrophobic layer is 99.58% at 1064 nm with normal incidence. The contact angle with water is 115.6[Formula: see text]. The laser damage threshold of the zero probability is 22 J/cm2 at 1064 nm with the 12 ns pulse width. This new hydrophobic antireflective coating can be applied in the areas of astronomical optics, laser medical equipment and solar energy, etc.