SCANNING PROBE MICROSCOPY BASED NANOSCALE PATTERNING AND FABRICATION
Keyword(s):
Nanotechnology is vital to the fabrication of integrated circuits, memory devices, display units, biochips and biosensors. Scanning probe microscope (SPM) has emerged to be a unique tool for materials structuring and patterning with atomic and molecular resolution. SPM includes scanning tunneling microscopy (STM) and atomic force microscopy (AFM). In this chapter, we selectively discuss the atomic and molecular manipulation capabilities of STM nanolithography. As for AFM nanolithography, we focus on those nanopatterning techniques involving water and/or air when operated in ambient. The typical methods, mechanisms and applications of selected SPM nanolithographic techniques in nanoscale structuring and fabrication are reviewed.
2015 ◽
Vol 86
(12)
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pp. 123703
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1989 ◽
Vol 47
◽
pp. 778-779
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Keyword(s):
1993 ◽
Vol 51
◽
pp. 874-875
1997 ◽
Vol 04
(04)
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pp. 637-649
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