ZnO Films with Very High Haze Value for Use as Front Transparent Conductive Oxide Films in Thin-Film Silicon Solar Cells

2010 ◽  
Vol 3 (5) ◽  
pp. 051102 ◽  
Author(s):  
Aswin Hongsingthong ◽  
Taweewat Krajangsang ◽  
Ihsanul Afdi Yunaz ◽  
Shinsuke Miyajima ◽  
Makoto Konagai
2010 ◽  
Author(s):  
T. Söderström ◽  
D. Dominé ◽  
A. Feltrin ◽  
M. Despeisse ◽  
F. Meillaud ◽  
...  

2003 ◽  
Vol 442 (1-2) ◽  
pp. 158-162 ◽  
Author(s):  
Joachim Müller ◽  
Gunnar Schöpe ◽  
Oliver Kluth ◽  
Bernd Rech ◽  
Volker Sittinger ◽  
...  

2012 ◽  
Vol 1426 ◽  
pp. 27-32
Author(s):  
T. Zimmermann ◽  
A. J. Flikweert ◽  
T. Merdzhanova ◽  
J. Woerdenweber ◽  
A. Gordijn ◽  
...  

ABSTRACTThin‑film silicon solar cells based on hydrogenated amorphous silicon (a‑Si:H) and hydrogenated microcrystalline silicon (μc‑Si:H) absorber layers are typically deposited using static plasma-enhanced chemical vapor deposition (PECVD) processes. It has been found that the use of very‑high frequencies (VHF) is beneficial for the material quality at high deposition rates when compared to radio-frequency (RF) processes. In the present work a dynamic VHF‑PECVD technique using linear plasma sources is developed. The linear plasma sources facilitate the use of very-high excitation frequencies on large electrode areas without compromising on the homogeneity of the deposition process. It is shown that state-of-the-art a‑Si:H and μc‑Si:H single-junction solar cells can be deposited incorporating intrinsic layers grown dynamically by VHF-PECVD at 0.35 nm/s and 0.95 nm/s, respectively.


2012 ◽  
Vol 258 (16) ◽  
pp. 5943-5946 ◽  
Author(s):  
Ke Tao ◽  
Yun Sun ◽  
Hongkun Cai ◽  
Dexian Zhang ◽  
Ke Xie ◽  
...  

2011 ◽  
Vol 98 (16) ◽  
pp. 163503 ◽  
Author(s):  
Milan Vanecek ◽  
Oleg Babchenko ◽  
Adam Purkrt ◽  
Jakub Holovsky ◽  
Neda Neykova ◽  
...  

2012 ◽  
Vol 358 (17) ◽  
pp. 2202-2205 ◽  
Author(s):  
Steve Reynolds ◽  
Suman Anand ◽  
Amjad Meftah ◽  
Vladimir Smirnov

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