High Mobility Poly-Si Thin Film Transistors Using Solid Phase Crystallized a-Si Films Deposited by Plasma-Enhanced Chemical Vapor Deposition
1990 ◽
Vol 29
(Part 2, No. 12)
◽
pp. L2380-L2383
◽
Keyword(s):
Si Films
◽
1993 ◽
Vol 40
(11)
◽
pp. 2128-2129
◽
Keyword(s):
1994 ◽
Vol 25
(2-4)
◽
pp. 329-336
◽
Keyword(s):
2006 ◽
Vol 45
(5B)
◽
pp. 4309-4312
◽
Keyword(s):
Keyword(s):
2010 ◽
Vol 157
(12)
◽
pp. H1110
◽
Keyword(s):