a-Si thin film transistors using dilute-gas plasma-enhanced chemical vapor deposition
Keyword(s):
1993 ◽
Vol 40
(11)
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pp. 2128-2129
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Keyword(s):
1994 ◽
Vol 25
(2-4)
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pp. 329-336
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Keyword(s):
2010 ◽
Vol 157
(12)
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pp. H1110
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Keyword(s):
2003 ◽
Vol 430
(1-2)
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pp. 220-225
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Keyword(s):
Keyword(s):
1994 ◽
Vol 141
(4)
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pp. 1040-1045
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1991 ◽