Mechanical characterization of a-C:H:SiOx coatings synthesized using radio-frequency plasma-assisted chemical vapor deposition method

Radio Frequency ◽

Vapor Deposition ◽

Mechanical Characterization ◽

Chemical Vapor ◽

Radio Frequency Plasma ◽

Deposition Method ◽

Development ofCH4-Radio-Frequency-Plasma-Enhanced Chemical Vapor Deposition Method with a Positively Self-Biased Electrode for Diamond-Like Carbon Film

Japanese Journal of Applied Physics ◽

10.1143/jjap.36.2817 ◽

1997 ◽

Vol 36 (Part 1, No. 5A) ◽

pp. 2817-2821 ◽

Cited By ~ 6

Author(s):

Hiroshi Inaba ◽

Yuuichi Kokaku ◽

Masatomo Terakado ◽

Hiroyuki Kataoka

Keyword(s):

Radio Frequency ◽

Vapor Deposition ◽

Carbon Film ◽

Chemical Vapor ◽

Diamond Like Carbon ◽

Radio Frequency Plasma ◽

Deposition Method ◽

Silicon rich silicon oxide films deposited by radio frequency plasma enhanced chemical vapor deposition method: Optical and structural properties

Applied Surface Science ◽

10.1016/j.apsusc.2011.05.112 ◽

2011 ◽

Vol 257 (23) ◽

pp. 9717-9723 ◽

Cited By ~ 24

Author(s):

Sumita Mukhopadhyay ◽

Swati Ray

Keyword(s):

Radio Frequency ◽

Structural Properties ◽

Vapor Deposition ◽

Silicon Oxide ◽

Chemical Vapor ◽

Radio Frequency Plasma ◽

Deposition Method ◽

Photo-induced properties of thin TiO2 films deposited using the radio frequency plasma enhanced chemical vapor deposition method

Thin Solid Films ◽

10.1016/j.tsf.2006.12.183 ◽

2007 ◽

Vol 515 (13) ◽

pp. 5275-5281 ◽

Cited By ~ 19

Author(s):

Hieronim Szymanowski ◽

Anna Sobczyk-Guzenda ◽

Adam Rylski ◽

Witold Jakubowski ◽

Maciej Gazicki-Lipman ◽

...

Keyword(s):

Radio Frequency ◽

Vapor Deposition ◽

Chemical Vapor ◽

Radio Frequency Plasma ◽

Tio2 Films ◽

Deposition Method ◽

Selective growth of CNT by using triode-type radio frequency plasma chemical vapor deposition method

Diamond and Related Materials ◽

10.1016/j.diamond.2006.11.066 ◽

2007 ◽

Vol 16 (4-7) ◽

pp. 1106-1109 ◽

Cited By ~ 4

Author(s):

Yoshiyuki Show ◽

Norihiko Fukuzumi

Keyword(s):

Radio Frequency ◽

Vapor Deposition ◽

Chemical Vapor ◽

Radio Frequency Plasma ◽

Deposition Method ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Electrical and Optical Properties of Si-Incorporated a-C:H Films via the Radio Frequency Plasma-Enhanced Chemical Vapor Deposition Method

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2016.12216 ◽

2016 ◽

Vol 16 (5) ◽

pp. 5394-5397

Author(s):

In Jun Kim ◽

Won Seok Choi ◽

Byungyou Hong

Keyword(s):

Optical Properties ◽

Radio Frequency ◽

Vapor Deposition ◽

Chemical Vapor ◽

Radio Frequency Plasma ◽

Deposition Method ◽

Electrical And Optical Properties ◽

Formation of Carbon Nitride Films by the Radio-Frequency Plasma Chemical Vapor Deposition Method

Japanese Journal of Applied Physics ◽

10.1143/jjap.36.4893 ◽

1997 ◽

Vol 36 (Part 1, No. 7B) ◽

pp. 4893-4896 ◽

Cited By ~ 17

Author(s):

Mei Zhang ◽

Ping Wang ◽

Yoshikazu Nakayama

Keyword(s):

Vapor Deposition ◽

Carbon Nitride ◽

Chemical Vapor ◽

Radio Frequency Plasma ◽

Deposition Method ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Synthesis and characterization of carbon nanowalls on different substrates by radio frequency plasma enhanced chemical vapor deposition

Carbon ◽

10.1016/j.carbon.2014.02.025 ◽

2014 ◽

Vol 72 ◽

pp. 372-380 ◽

Cited By ~ 83

Author(s):

Keivan Davami ◽

Mehrdad Shaygan ◽

Nazli Kheirabi ◽

Jiong Zhao ◽

Daria A. Kovalenko ◽

...

Keyword(s):

Radio Frequency ◽

Vapor Deposition ◽

Chemical Vapor ◽

Synthesis And Characterization ◽

Radio Frequency Plasma ◽

Frequency Plasma ◽

Carbon Nanowalls

Synthesis of carbon nanosheets by inductively coupled radio-frequency plasma enhanced chemical vapor deposition

Carbon ◽

10.1016/j.carbon.2004.06.035 ◽

2004 ◽

Vol 42 (14) ◽

pp. 2867-2872 ◽

Cited By ~ 332

Author(s):

Jianjun Wang ◽

Mingyao Zhu ◽

Ron A. Outlaw ◽

Xin Zhao ◽

Dennis M. Manos ◽

...

Keyword(s):

Radio Frequency ◽

Vapor Deposition ◽

Chemical Vapor ◽

Radio Frequency Plasma ◽

Carbon Nanosheets ◽

Inductively Coupled ◽

Characterization of Carbon Nanotubes with TiO2 by the (CVD) Chemical Vapor Deposition Method

Microscopy and Microanalysis ◽

10.1017/s1431927618005950 ◽

2018 ◽

Vol 24 (S1) ◽

pp. 1094-1095 ◽

Cited By ~ 1

Author(s):

Abraham A. Mejía ◽

L. Béjar ◽

C. Parra ◽

C. Aguilar ◽

A. Medina ◽

...

Keyword(s):

Carbon Nanotubes ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Method

GROWING CARBON BUCKONIONS BY RADIO FREQUENCY PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION

Acta Physica Sinica ◽

10.7498/aps.50.1264 ◽

2001 ◽

Vol 50 (7) ◽

pp. 1264

Author(s):

CHEN XIAO-HUA ◽

WU GUO-TAO ◽

DENG FU-MING ◽

WANG JIAN-XIONG ◽

YANG HANG-SHENG ◽

...

Keyword(s):

Radio Frequency ◽

Vapor Deposition ◽

Chemical Vapor ◽

Radio Frequency Plasma ◽