Structural Analysis for Water Absorption of SiOF Films Prepared by High-Density-Plasma Chemical Vapor Deposition

1998 ◽  
Vol 37 (Part 1, No. 5A) ◽  
pp. 2411-2415 ◽  
Author(s):  
Takahiro Tamura ◽  
Junro Sakai ◽  
Yoichi Inoue ◽  
Makoto Satoh ◽  
Hikaru Yoshitaka
Keyword(s):  
Chemical Vapor Deposition ◽  
Structural Analysis ◽  
Water Absorption ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
High Density ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition ◽  
Density Plasma

Calibration Method for High-Density-Plasma Chemical Vapor Deposition Simulation

2002 ◽  
Vol 41 (Part 1, No. 4A) ◽  
pp. 1974-1980 ◽  
Author(s):  
Shigeru Kinoshita ◽  
Shigeyuki Takagi ◽  
Hidehiko Yabuhara ◽  
Hiroshi Nishimura ◽  
Hideichi Kawaguchi ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Calibration Method ◽  
High Density ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition ◽  
Deposition Simulation ◽  
Density Plasma
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