( La , Sr ) MnO 3 (LSMO) single-layer and LSMO/YBCO double-layer films have been grown on LAO and MgO substrates using ion beam sputtering. For LSMO single-layer films, the highly epitaxial films can be grown at lower substrate temperatures down to 500°C. The epitaxy of the films, which is degraded with increasing TS, can be restored by supply of plasma oxygen. Smaller lattice mismatch of LSMO on LAO gives two-dimensional step-and-terrace type growth, whereas on MgO grain type growth is observed due to larger mismatch. For the double-layer films, LSMO layer can be grown epitaxially on a-oriented YBCO underlayer, but a part of the underlying a-YBCO is changed into c-YBCO during the deposition of overlayer. For c-YBCO underlayer, a part of the underlying c-YBCO is changed into (110)-oriented phase after the deposition of overlayer. Then it is necessary to deposit the overlayer at lower temperatures.