Silicon Plate Thickness Measurement System Using Near-Infrared Optical Interferometry

1999 ◽  
Vol 38 (Part 1, No. 7A) ◽  
pp. 4256-4257 ◽  
Author(s):  
Hiroyuki Fujimoto
Keyword(s):  
Measurement System ◽  
Near Infrared ◽  
Plate Thickness ◽  
Thickness Measurement ◽  
Optical Interferometry ◽  
Silicon Plate ◽  
Thickness Measurement System

A Thin Silicon Wafer Thickness Measurement System by Optical Reflectmetry Scheme Using Fourier Transform Near-Infrared Spectrometer

2013 ◽  
Vol 797 ◽  
pp. 549-554 ◽  
Author(s):  
Teppei Onuki ◽  
Ryusuke Ono ◽  
Akira Suzuki ◽  
Hirotaka Ojima ◽  
Jun Shimizu ◽  
...  
Keyword(s):  
Fourier Transform ◽  
Measurement System ◽  
Near Infrared ◽  
Thickness Measurement ◽  
High Spectral Resolution ◽  
High Signal ◽  
Infrared Band ◽  
Infrared Spectrometer ◽  
Near Infrared Spectrometer ◽  
Thickness Measurement System

In this study, measurable thickness range was improved by re-customized components of the thickness measurement system using the method of Fabry-Perot interference signature analyzing. A Fourier transform near infrared (FT-NIR) spectrometer with indium gallium arsenide was used in the developed system. As a result of the sensitiveness in the whole near infrared band and high spectral resolution united with high signal noise ratio of the FT-NIR spectrometer, the maximum measurable thickness is improved to 88μm while sub-micron order of the minimum measurable thickness is also improved.

Optical non-contact micrometer thickness measurement system for silica thick films

2012 ◽  
Author(s):  
K. Thambiratnam ◽  
H. Ahmad ◽  
M. Yasin ◽  
A. Z. Zulkifli ◽  
S. W. Harun
Keyword(s):  
Measurement System ◽  
Thick Films ◽  
Thickness Measurement ◽  
Thickness Measurement System

Application of Automatic Ultrasonic Wall Thickness Measurement System in Nuclear Fuel Encrust Tube Billet Wall Abrasive Grinding

2012 ◽  
Vol 565 ◽  
pp. 662-667
Author(s):  
Yun Huang ◽  
Yong Sheng Chen ◽  
Wei Wan ◽  
Cao Yong Tang ◽  
Ming De Zhang
Keyword(s):  
Nuclear Fuel ◽  
Wall Thickness ◽  
Measurement System ◽  
Thickness Measurement ◽  
System Stability ◽  
Tube Billet ◽  
Wall Thickness Measurement ◽  
Main Components ◽  
Thickness Measurement System ◽  
The Way

This paper introduces an automatic ultrasonic wall thickness measurement system, which adopts the way that the tube billet is partially immersed in the water during the measurement, applied in wall abrasive grinding of nuclear fuel encrust tube billet. Meanwhile, the main components of the measurement system, as well as their characters and functions, are addressed. What’s more, the analysis of the factors, which influencing the system stability and measuring reliability, are also conducted, coupling with the system stability and measuring reliability demonstration.

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