Two-Dimensional Measurement of He Metastable Atom Density Profile in Front of Substrate in Electron Cyclotron Resonance Plasma Flow by Laser-Induced Fluorescence Spectroscopy

Japanese Journal of Applied Physics ◽

10.1143/jjap.38.4380 ◽

1999 ◽

Vol 38 (Part 1, No. 7B) ◽

pp. 4380-4382 ◽

Author(s):

Mahiko Watanabe ◽

Ken Takiyama ◽

Hiroshi Toyota ◽

Toshiatsu Oda

Keyword(s):

Fluorescence Spectroscopy ◽

Density Profile ◽

Plasma Flow ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Laser Induced Fluorescence ◽

Two Dimensional ◽

Atom Density ◽

Dimensional Measurement ◽

Resonance Plasma

Download Full-text

Preparation of transparent Nb/two-dimensional electron gas contacts by using electron cyclotron resonance plasma cleaning

Journal of Applied Physics ◽

10.1063/1.1290256 ◽

2000 ◽

Vol 88 (7) ◽

pp. 4440 ◽

Author(s):

Th. Schäpers ◽

R. P. Müller ◽

G. Crecelius ◽

H. Hardtdegen ◽

H. Lüth

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Gas ◽

Electron Cyclotron ◽

Plasma Cleaning ◽

Two Dimensional ◽

Dimensional Electron ◽

Two Dimensional Electron Gas ◽

Dimensional Electron Gas ◽

Resonance Plasma

Download Full-text

Modeling of plasma flow downstream of an electron cyclotron resonance plasma source

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.576649 ◽

1990 ◽

Vol 8 (3) ◽

pp. 2913-2918 ◽

Author(s):

Makarem A. Hussein ◽

G. A. Emmert

Keyword(s):

Plasma Flow ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Plasma Source ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

Download Full-text

Two-dimensional simulation of an electron cyclotron resonance plasma source with power deposition and neutral gas depletion

Plasma Sources Science and Technology ◽

10.1088/0963-0252/11/3/306 ◽

2002 ◽

Vol 11 (3) ◽

pp. 260-265 ◽

Author(s):

Minghai Liu ◽

Xiwei Hu ◽

Guoyang Yu ◽

Qinchong Wu ◽

Yuan Pan

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Plasma Source ◽

Electron Cyclotron ◽

Two Dimensional ◽

Electron Cyclotron Resonance Plasma ◽

Power Deposition ◽

Neutral Gas ◽

Dimensional Simulation ◽

Resonance Plasma

Download Full-text

Ion temperature in an electron cyclotron resonance plasma as determined by laser induced fluorescence Doppler width measurements

10.1109/plasma.1990.110846 ◽

1990 ◽

Author(s):

E.A. Den Hartog ◽

H. Persing ◽

R.C. Woods

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Laser Induced Fluorescence ◽

Electron Cyclotron ◽

Doppler Width ◽

Ion Temperature ◽

Electron Cyclotron Resonance Plasma ◽

Width Measurements ◽

Resonance Plasma

Download Full-text

A two-dimensional simulation of electron cyclotron resonance plasma and comparison with experimental data

Thin Solid Films ◽

10.1016/s0040-6090(98)01513-2 ◽

1999 ◽

Vol 341 (1-2) ◽

pp. 18-21 ◽

Author(s):

Chee Burm Shin ◽

Jin Seok Hur ◽

Soo Ghee Oh

Keyword(s):

Experimental Data ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Two Dimensional ◽

Electron Cyclotron Resonance Plasma ◽

Dimensional Simulation ◽

Resonance Plasma ◽

Comparison With Experimental Data

Download Full-text

Mechanism of dissociative excitation of BrCN in electron cyclotron resonance plasma flow of He

Chemical Physics ◽

10.1016/j.chemphys.2007.08.018 ◽

2007 ◽

Vol 340 (1-3) ◽

pp. 197-202 ◽

Author(s):

Haruhiko Ito ◽

Hiroki Hayashi ◽

Yukihisa Kogure

Keyword(s):

Plasma Flow ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Dissociative Excitation ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

Download Full-text

Two‐dimensional modeling of electron cyclotron resonance plasma production

Journal of Applied Physics ◽

10.1063/1.351566 ◽

1992 ◽

Vol 72 (7) ◽

pp. 2652-2658 ◽

Author(s):

Yasuyoshi Yasaka ◽

Atsushi Fukuyama ◽

Akimitsu Hatta ◽

Ryohei Itatani

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Two Dimensional ◽

Electron Cyclotron Resonance Plasma ◽

Plasma Production ◽

Dimensional Modeling ◽

Resonance Plasma

Download Full-text

Two-dimensional simulation of an electron cyclotron resonance plasma source with self-consistent power deposition

Surface and Coatings Technology ◽

10.1016/s0257-8972(00)00798-2 ◽

2000 ◽

Vol 131 (1-3) ◽

pp. 29-33

Author(s):

Minghai Liu ◽

Xiwei Hu ◽

Hanming Wu ◽

Qinchong Wu ◽

Guoyang Yu ◽

...

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Plasma Source ◽

Electron Cyclotron ◽

Two Dimensional ◽

Electron Cyclotron Resonance Plasma ◽

Power Deposition ◽

Self Consistent ◽

Dimensional Simulation ◽

Resonance Plasma

Download Full-text

Laser‐induced fluorescence measurements of transverse ion temperature in an electron cyclotron resonance plasma

Applied Physics Letters ◽

10.1063/1.103585 ◽

1990 ◽

Vol 57 (7) ◽

pp. 661-663 ◽

Author(s):

E. A. Den Hartog ◽

H. Persing ◽

R. Claude Woods

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Laser Induced Fluorescence ◽

Electron Cyclotron ◽

Ion Temperature ◽

Electron Cyclotron Resonance Plasma ◽

Fluorescence Measurements ◽

Resonance Plasma

Download Full-text

Electron temperature, density, and metastable-atom density of argon electron–cyclotron-resonance plasma discharged by 7.0, 8.0, and 9.4 GHz microwaves

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1289542 ◽

2000 ◽

Vol 18 (5) ◽

pp. 2207 ◽

Author(s):

Y. Kawai ◽

K. Kano ◽

T. Suzuki ◽

H. Akatsuka ◽

Y. Fujii

Keyword(s):

Electron Temperature ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Metastable Atom ◽

Electron Cyclotron Resonance Plasma ◽

Atom Density ◽

Resonance Plasma

Download Full-text