A two-dimensional simulation of electron cyclotron resonance plasma and comparison with experimental data

1999 ◽  
Vol 341 (1-2) ◽  
pp. 18-21 ◽  
Author(s):  
Chee Burm Shin ◽  
Jin Seok Hur ◽  
Soo Ghee Oh
Keyword(s):  
Experimental Data ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Two Dimensional ◽  
Electron Cyclotron Resonance Plasma ◽  
Dimensional Simulation ◽  
Resonance Plasma ◽  
Comparison With Experimental Data

Electron cyclotron resonance plasma etching of InP in CH4/H2/Ar

1990 ◽  
Vol 56 (15) ◽  
pp. 1424-1426 ◽  
Author(s):  
S. J. Pearton ◽  
U. K. Chakrabarti ◽  
A. P. Kinsella ◽  
D. Johnson ◽  
C. Constantine
Keyword(s):  
Plasma Etching ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma
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