Two-dimensional simulation of an electron cyclotron resonance plasma source with power deposition and neutral gas depletion
2002 ◽
Vol 11
(3)
◽
pp. 260-265
◽
1994 ◽
Vol 12
(4)
◽
pp. 1281-1286
◽
1993 ◽
Vol 32
(Part 2, No. 6A)
◽
pp. L802-L805
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1990 ◽
Vol 61
(9)
◽
pp. 2407-2411
◽
1994 ◽
Vol 12
(4)
◽
pp. 1241-1243
1997 ◽
Vol 15
(3)
◽
pp. 736
◽