Gap Length Dependence of Electron Energy Distribution in Low-Pressure Ar Capacitively Coupled RF Discharges

Japanese Journal of Applied Physics ◽

10.1143/jjap.39.1351 ◽

2000 ◽

Vol 39 (Part 1, No. 3A) ◽

pp. 1351-1357 ◽

Author(s):

Takashi Kimura ◽

Kouji Kaga ◽

Kazuyuki Ohe

Keyword(s):

Energy Distribution ◽

Electron Energy ◽

Low Pressure ◽

Electron Energy Distribution ◽

Capacitively Coupled ◽

Length Dependence ◽

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Electron‐energy distribution function measurements in capacitively coupled rf discharges

Journal of Applied Physics ◽

10.1063/1.348935 ◽

1991 ◽

Vol 69 (1) ◽

pp. 121-128 ◽

Author(s):

G. Dilecce ◽

M. Capitelli ◽

S. De Benedictis

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Capacitively Coupled ◽

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Effect of driving frequency on the electron energy distribution function and electron-sheath interaction in a low pressure capacitively coupled plasma

Physics of Plasmas ◽

10.1063/1.4967356 ◽

2016 ◽

Vol 23 (11) ◽

pp. 110701 ◽

Author(s):

S. Sharma ◽

N. Sirse ◽

P. K. Kaw ◽

M. M. Turner ◽

A. R. Ellingboe

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Low Pressure ◽

Energy Distribution Function ◽

Driving Frequency ◽

Electron Energy Distribution ◽

Capacitively Coupled ◽

Capacitively Coupled Plasma

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Electron energy distribution function in capacitively coupled RF discharges: difference between electropositive Ar and electronegative SiH4discharges

Plasma Sources Science and Technology ◽

10.1088/0963-0252/9/4/314 ◽

2000 ◽

Vol 9 (4) ◽

pp. 583-591 ◽

Author(s):

M Yan ◽

A Bogaerts ◽

W J Goedheer ◽

R Gijbels

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Capacitively Coupled ◽

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Measurement of electron energy distribution in low-pressure RF discharges

Plasma Sources Science and Technology ◽

10.1088/0963-0252/1/1/006 ◽

1992 ◽

Vol 1 (1) ◽

pp. 36-58 ◽

Author(s):

V A Godyak ◽

R B Piejak ◽

B M Alexandrovich

Keyword(s):

Energy Distribution ◽

Electron Energy ◽

Low Pressure ◽

Electron Energy Distribution ◽

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Spatial evolution of the electron energy distribution function in a low-pressure capacitively coupled plasma containing argon and krypton

Plasma Sources Science and Technology ◽

10.1088/0963-0252/21/4/045009 ◽

2012 ◽

Vol 21 (4) ◽

pp. 045009 ◽

Author(s):

Xi-Ming Zhu ◽

Wen-Cong Chen ◽

Jiang Li ◽

Zhi-Wen Cheng ◽

Yi-Kang Pu

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Low Pressure ◽

Energy Distribution Function ◽

Spatial Evolution ◽

Electron Energy Distribution ◽

Capacitively Coupled ◽

Capacitively Coupled Plasma

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Measurements on the electron-energy distribution function in a low-pressure cesium discharge

Physica ◽

10.1016/0031-8914(72)90050-x ◽

1972 ◽

Vol 57 (4) ◽

pp. 624-627 ◽

Author(s):

A.J. Postma ◽

K. Wiesemann

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Low Pressure ◽

Energy Distribution Function ◽

Electron Energy Distribution

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Observations of Electron Energy Distribution Functions and Ion Bombardment Secondary Electrons in a Capacitively Coupled Radio Frequency Plasma

IEEJ Transactions on Fundamentals and Materials ◽

10.1541/ieejfms1990.119.6_866 ◽

1999 ◽

Vol 119 (6) ◽

pp. 866-871 ◽

Author(s):

Yasunori Ohtsu ◽

Hiroharu Fujita

Keyword(s):

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Distribution Functions ◽

Radio Frequency Plasma ◽

Electron Energy Distribution ◽

Secondary Electrons ◽

Capacitively Coupled ◽

Frequency Plasma ◽

Energy Distribution Functions

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Influence of excitation frequency on the metastable atoms and electron energy distribution function in a capacitively coupled argon discharge

Physics of Plasmas ◽

10.1063/1.5031221 ◽

2018 ◽

Vol 25 (6) ◽

pp. 063501 ◽

Author(s):

S. Sharma ◽

N. Sirse ◽

M. M. Turner ◽

A. R. Ellingboe

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Excitation Frequency ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Capacitively Coupled ◽

Argon Discharge

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Observations of bi-Maxwellian and single Maxwellian electron energy distribution functions in a capacitively coupled radio-frequency plasmas by laser Thomson scattering

Applied Physics Letters ◽

10.1063/1.1363695 ◽

2001 ◽

Vol 78 (21) ◽

pp. 3187-3189 ◽

Author(s):

M. A. Mansour ElSabbagh ◽

M.D. Bowden ◽

K. Uchino ◽

K. Muraoka

Keyword(s):

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Thomson Scattering ◽

Distribution Functions ◽

Electron Energy Distribution ◽

Capacitively Coupled ◽

Energy Distribution Functions

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Electron energy distribution function in low-pressure complex plasmas

Journal of Plasma Physics ◽

10.1017/s002237780400354x ◽

2005 ◽

Vol 71 (2) ◽

pp. 217-224 ◽

Author(s):

K. OSTRIKOV ◽

I. DENYSENKO ◽

M. Y. YU ◽

S. XU

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Low Pressure ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Complex Plasmas

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