Dominance of Cl2+or Cl+Ions in Time-Modulated Inductively Coupled Cl2Plasma Investigated with Laser-Induced Fluorescence Technique and Probe Measurements
2000 ◽
Vol 39
(Part 1, No. 12B)
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pp. 6980-6984
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2001 ◽
Vol 10
(2)
◽
pp. 205-210
◽
1994 ◽
Vol 33
(Part 1, No. 3A)
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pp. 1571-1576
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1999 ◽
Vol 8
(4)
◽
pp. 553-560
◽
2003 ◽
Vol 14
(7)
◽
pp. 975-982
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Keyword(s):