High-Quality GaN Layers on c-Plane Sapphire Substrates by Plasma-Assisted Molecular-Beam Epitaxy Using Double-Step AlN Buffer Process

2002 ◽  
Vol 41 (Part 1, No. 7A) ◽  
pp. 4454-4457 ◽  
Author(s):  
Kulandaivel Jeganathan ◽  
Xu-Qiang Shen ◽  
Toshihide Ide ◽  
Mitsuaki Shimizu ◽  
Hajime Okumura
Author(s):  
M. A. Sánchez-García ◽  
E. Calleja ◽  
E. Monroy ◽  
F. J. Sánchez ◽  
F. Calle ◽  
...  

High quality AlN layers with full widths at half maximum values of 10 arcmin and average surface roughness (rms) of 48Å were grown by molecular beam epitaxy on Si(111) substrates. A systematic study and optimization of the growth conditions was performed in order to use these AlN layers as buffers in the growth of GaN films. Atomic force microscopy (AFM) and X-ray diffraction (XRD) techniques were employed to determine the surface and structural quality of the layers. Best AlN films were obtained at high substrate temperatures (Tsubs>900°C) and III/V ratios close to stoichiometry. Growth conditions with III/V ratios beyond stoichiometry (Al-rich) did not further improve the crystal quality. In these cases a higher substrate temperature is needed to prevent condensation of Al on the surface. GaN films with full width at half maximum of 10 arcmin and improved optical properties were grown on top of optimized AlN buffer layers.


CrystEngComm ◽  
2014 ◽  
Vol 16 (33) ◽  
pp. 7626-7632 ◽  
Author(s):  
Wenliang Wang ◽  
Weijia Yang ◽  
Zuolian Liu ◽  
Yunhao Lin ◽  
Shizhong Zhou ◽  
...  

2 inch high-quality Al epitaxial films with sharp and abrupt Al/Al2O3 interfaces have been grown on sapphire substrates by molecular beam epitaxy with an in-plane alignment of Al[11̄0]/Al2O3[11̄00].


2001 ◽  
Vol 693 ◽  
Author(s):  
M. A. Reshchikov ◽  
D. Huang ◽  
F. Yun ◽  
H. Morkoç ◽  
R. J. Molnar ◽  
...  

AbstractWe analyzed the photoluminescence (PL) spectra of undoped GaN films grown by molecular beam epitaxy on sapphire substrates. While the PL spectra from high-quality samples contain free and bound exciton peaks only, the spectra from some samples involve sharp unidentified peaks in the energy range of 3.0 – 3.45 eV, specifically at 3.21, 3.32, 3.36, and 3.42 eV. We attribute these peaks to excitons bound to defects because of the linear and sometimes superlinear increase in their intensity with excitation density without saturation up to 100 W/cm2. With increasing temperature these peaks quench in a well-known fashion similar to that for excitons. In order to relate the observed peaks to the structural defects, we etched selected samples in hot H3PO4 acid or, alternatively, with photo-electrochemical (PEC) etching at room temperature in the presence of UV-illumination in a dilute KOH solution. In the former case the dislocations were etched leaving etched pits on the surface, while in the latter case the dislocations remained unetched due to a deficit of photogenerated holes at dislocation sites. We found that the 3.42 eV peak disappeared after both hot wet and PEC etching suggesting that the associated defect is at the GaN surface. Peaks at 3.21 and 3.36 eV could be enhanced greatly by PEC etching, which were correlated to bulk dislocations.


2012 ◽  
Vol 112 (4) ◽  
pp. 1051-1055 ◽  
Author(s):  
Ping Ding ◽  
Xinhua Pan ◽  
Zhizhen Ye ◽  
Haiping He ◽  
Honghai Zhang ◽  
...  

2013 ◽  
Vol 279 ◽  
pp. 212-215 ◽  
Author(s):  
H.H. Zhang ◽  
X.H. Pan ◽  
P. Ding ◽  
J.Y. Huang ◽  
H.P. He ◽  
...  

2010 ◽  
Vol 97 (19) ◽  
pp. 192501 ◽  
Author(s):  
Y. Maeda ◽  
K. Hamaya ◽  
S. Yamada ◽  
Y. Ando ◽  
K. Yamane ◽  
...  

RSC Advances ◽  
2017 ◽  
Vol 7 (75) ◽  
pp. 47789-47795 ◽  
Author(s):  
Y. Tung ◽  
C. W. Chong ◽  
C. W. Liao ◽  
C. H. Chang ◽  
S. Y. Huang ◽  
...  

High-quality crystalline (Cr,Sb)-doped Bi2Se3(Cr-BSS) films were synthesized using molecular beam epitaxy (MBE).


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