Epitaxial growth and characterization of high-quality aluminum films on sapphire substrates by molecular beam epitaxy
Keyword(s):
2 inch high-quality Al epitaxial films with sharp and abrupt Al/Al2O3 interfaces have been grown on sapphire substrates by molecular beam epitaxy with an in-plane alignment of Al[11̄0]/Al2O3[11̄00].
2003 ◽
Vol 252
(1-3)
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pp. 128-135
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2016 ◽
Vol 54
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pp. 70-76
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1997 ◽
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pp. 1045-1050
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2011 ◽
Vol 336
(1)
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pp. 40-43
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1997 ◽
Vol 117-118
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pp. 518-522
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2007 ◽
Vol 301-302
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pp. 676-679
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2002 ◽
Vol 237-239
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pp. 538-543
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