Low-Temperature Crystallization of Amorphous Silicon by Atmospheric-Pressure Plasma Treatment in H2/He or H2/Ar Mixture
2006 ◽
Vol 45
(10B)
◽
pp. 8488-8493
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Keyword(s):
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2014 ◽
Vol 102
◽
pp. 167-173
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Keyword(s):
2008 ◽
Vol 36
(4)
◽
pp. 970-971
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Keyword(s):
2021 ◽
Vol 6
(1)
◽
pp. 78-86