Deposition-Temperature Effect on Nitride Trapping Layer of Silicon–Oxide–Nitride–Oxide–Silicon Memory

2007 ◽  
Vol 46 (5A) ◽  
pp. 2827-2830 ◽  
Author(s):  
Jia-Lin Wu ◽  
Chin-Hsing Kao ◽  
Hua-Ching Chien ◽  
Cheng-Yen Wu ◽  
Je-Chuang Wang
Keyword(s):  
Temperature Effect ◽  
Deposition Temperature ◽  
Silicon Oxide ◽  
Nitride Oxide

Deposition Temperature Effect on the Structure and Optical Property of RF-PACVD-Derived Hydrogenated SiCNO Film

2006 ◽  
Vol 37 (2) ◽  
pp. 173-177 ◽  
Author(s):  
Y. Zhou ◽  
X. Yan ◽  
E. Kroke ◽  
R. Riedel ◽  
D. Probst ◽  
...  
Keyword(s):  
Optical Property ◽  
Temperature Effect ◽  
Deposition Temperature

Deposition temperature effect on a-Si:H produced by DC magnetron sputtering

2011 ◽  
Author(s):  
R. J. Santana ◽  
T. D. O. Moura ◽  
G. R. Guimaraes ◽  
D. O. Miranda ◽  
R. T. Proenca ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Temperature Effect ◽  
Deposition Temperature ◽  
Dc Magnetron Sputtering

Channel width dependence of hot electron injection program/hot hole erase cycling behavior in silicon-oxide-nitride-oxide-silicon (SONOS) memories

2008 ◽  
Vol 52 (6) ◽  
pp. 844-848 ◽  
Author(s):  
Seung-Hwan Seo ◽  
Se-Woon Kim ◽  
Jang-Uk Lee ◽  
Gu-Cheol Kang ◽  
Kang-Seob Roh ◽  
...  
Keyword(s):  
Silicon Oxide ◽  
Electron Injection ◽  
Channel Width ◽  
Hot Electron ◽  
Hot Electron Injection ◽  
Nitride Oxide ◽  
Cycling Behavior

Transient conduction in multidielectric silicon–oxide–nitride–oxide semiconductor structures

2001 ◽  
Vol 89 (5) ◽  
pp. 2791-2800 ◽  
Author(s):  
H. Bachhofer ◽  
H. Reisinger ◽  
E. Bertagnolli ◽  
H. von Philipsborn
Keyword(s):  
Silicon Oxide ◽  
Oxide Semiconductor ◽  
Semiconductor Structures ◽  
Transient Conduction ◽  
Nitride Oxide

Scalable 2-bit silicon–oxide–nitride–oxide–silicon (SONOS) memory with physically separated local nitrides under a merged gate

2004 ◽  
Vol 48 (10-11) ◽  
pp. 1771-1775 ◽  
Author(s):  
Yong Kyu Lee ◽  
Suk Kang Sung ◽  
Jae Sung Sim ◽  
Ki Whan Song ◽  
Jong Duk Lee ◽  
...  
Keyword(s):  
Silicon Oxide ◽  
Nitride Oxide
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