ABSTRACTThe coordination of the carbon atoms in the diamond-like carbon (DLC) films formed by Ar gas cluster ion beam (GCIB) assisted deposition of fullerene was investigated using synchrotron radiation. Near-edge x-ray absorption fine structure (NEXAFS) spectra of the carbon K-edge of the DLC films formed by various methods were measured over the excitation energy range 275-320 eV, using synchrotron radiation. On the basis of the analysis of the peak corresponding the transition of the excitation electron from carbon 1s orbital to Φ orbital, relative sp2 contents of various DLC films were determined. The DLC films formed by Ar GCIB assisted fullerene deposition were found to consist of a high sp3 hybridized carbon.
Practical Applications of Argon Gas Cluster Ion Beam for X-ray Photoelectron Spectroscopy and Time-of-flight Secondary Ion Mass Spectrometry
