Theoretical Studies of Realizing High Sensitivity for Frequency-Change-Type Single-Crystal Silicon Two-Axis Acceleration Sensor
2008 ◽
Vol 47
(8)
◽
pp. 6578-6582
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Keyword(s):
2007 ◽
Vol 46
(7B)
◽
pp. 4652-4655
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Keyword(s):
2008 ◽
Vol 47
(5)
◽
pp. 4048-4051
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Keyword(s):
1985 ◽
Vol 43
◽
pp. 300-301
1992 ◽
Vol 112
(9)
◽
pp. 835-839
Keyword(s):