Suppression of Fluorine Diffusion into Methyl Boron Carbon Nitride Film Using Low-Temperature Etching
Keyword(s):
2007 ◽
Vol 16
(4-7)
◽
pp. 1300-1303
◽
Keyword(s):
2007 ◽
Vol 254
(2)
◽
pp. 596-599
◽
Keyword(s):
2018 ◽
Vol 57
(2S2)
◽
pp. 02CB09
◽
2005 ◽
Vol 14
(3-7)
◽
pp. 719-723
◽
Keyword(s):
2009 ◽
Vol 255
(6)
◽
pp. 3635-3638
◽
2004 ◽
Vol 13
(4-8)
◽
pp. 1135-1138
◽
Keyword(s):