Boron carbon nitride film containing hydrogen for 2nm node low-k interconnection

2009 ◽  
Author(s):  
Hidemitsu Aoki ◽  
Takuroh Masuzumi ◽  
Makoto Hara ◽  
Daisuke Watanabe ◽  
Chiharu Kimura ◽  
...  
Keyword(s):  
Carbon Nitride ◽  
Nitride Film ◽  
Carbon Nitride Film ◽  
Boron Carbon Nitride ◽  
Low K ◽  
Boron Carbon

Characterization of boron carbon nitride film for humidity sensor

2007 ◽  
Vol 16 (4-7) ◽  
pp. 1300-1303 ◽  
Author(s):  
Hidemitsu Aoki ◽  
Hidekazu Shima ◽  
Chiharu Kimura ◽  
Takashi Sugino
Keyword(s):  
Carbon Nitride ◽  
Humidity Sensor ◽  
Nitride Film ◽  
Carbon Nitride Film ◽  
Boron Carbon Nitride ◽  
Boron Carbon

Characterization of boron carbon nitride film modified by excimer laser annealing

2007 ◽  
Vol 254 (2) ◽  
pp. 596-599 ◽  
Author(s):  
Hidemitsu Aoki ◽  
Kazutoshi Ohyama ◽  
Hiroshi Sota ◽  
Toshiaki Seino ◽  
Chiharu Kimura ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Carbon Nitride ◽  
Laser Annealing ◽  
Nitride Film ◽  
Excimer Laser Annealing ◽  
Carbon Nitride Film ◽  
Boron Carbon Nitride ◽  
Boron Carbon

Electron affinity and field emission characteristics of boron carbon nitride film

2005 ◽  
Vol 14 (3-7) ◽  
pp. 719-723 ◽  
Author(s):  
Chiharu Kimura ◽  
Kunitaka Okada ◽  
Shingo Funakawa ◽  
Shinichiro Sakata ◽  
Takashi Sugino
Keyword(s):  
Field Emission ◽  
Electron Affinity ◽  
Carbon Nitride ◽  
Nitride Film ◽  
Emission Characteristics ◽  
Carbon Nitride Film ◽  
Boron Carbon Nitride ◽  
Boron Carbon

Influence of oxygen plasma treatment on boron carbon nitride film composition

2009 ◽  
Vol 255 (6) ◽  
pp. 3635-3638 ◽  
Author(s):  
Hidemitsu Aoki ◽  
Takuro Masuzumi ◽  
Daisuke Watanabe ◽  
M.K. Mazumder ◽  
Hiroshi Sota ◽  
...  
Keyword(s):  
Plasma Treatment ◽  
Carbon Nitride ◽  
Oxygen Plasma ◽  
Nitride Film ◽  
Oxygen Plasma Treatment ◽  
Film Composition ◽  
Carbon Nitride Film ◽  
Boron Carbon Nitride ◽  
Boron Carbon

Suppression of Fluorine Diffusion into Methyl Boron Carbon Nitride Film Using Low-Temperature Etching

2010 ◽  
Vol 49 (4) ◽  
pp. 04DB10
Author(s):  
Makoto Hara ◽  
Takuro Masuzumi ◽  
Zhiming Lu ◽  
Chiharu Kimura ◽  
Hidemitsu Aoki ◽  
...  
Keyword(s):  
Low Temperature ◽  
Carbon Nitride ◽  
Nitride Film ◽  
Carbon Nitride Film ◽  
Boron Carbon Nitride ◽  
Boron Carbon

scholarly journals Hydrogenation of Boron Carbon Nitride Thin Films for Low-k Dielectric Applications

2021 ◽  
Author(s):  
Shraddha Dhanraj Nehate ◽  
Sreeram Sundaresh ◽  
Robert Peale ◽  
Kalpathy B. Sundaram
Keyword(s):  
Thin Films ◽  
Carbon Nitride ◽  
Boron Carbon Nitride ◽  
Low K ◽  
Boron Carbon

(Invited) Boron Carbon Nitride (BCN) Thin Films for Low-k Interdielectric Layer Applications

2021 ◽  
Vol MA2021-02 (14) ◽  
pp. 659-659
Author(s):  
Shraddha Dhanraj Nehate ◽  
Kalpathy B. Sundaram
Keyword(s):  
Thin Films ◽  
Carbon Nitride ◽  
Boron Carbon Nitride ◽  
Low K ◽  
Boron Carbon
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