Effect of Process Parameters on Particle Removal Efficiency in Poly(vinyl alcohol) Brush Scrubber Cleaning

2012 ◽  
Vol 51 ◽  
pp. 026501 ◽  
Author(s):  
Joonho An ◽  
Hyunseop Lee ◽  
Hyoungjae Kim ◽  
Haedo Jeong
2009 ◽  
Vol 145-146 ◽  
pp. 363-366 ◽  
Author(s):  
Yasa Sampurno ◽  
Yun Zhuang ◽  
Xun Gu ◽  
Sian Theng ◽  
Takenao Nemoto ◽  
...  

Brush scrubbing has been widely used in post chemical mechanical planarization (CMP) applications to remove contaminations, such as slurry residues and particles, from the wafer surface. During brush scrubbing, particle removal results from direct contact between a soft poly vinyl alcohol (PVA) brush and the wafer surface in which the brush asperities engulf the particles while the rotating motion of the brush, as well as the cleaning fluid at the surface, dislodge and carry the particles away from the wafer. The cleaning performance of brush scrubbing depends heavily on the choice of the cleaning solution and brush scrubber kinematics. In this work, the effect of various cleaning solutions and brush scrubber kinematics on the frictional attributes of post copper CMP cleaning process was investigated.


2020 ◽  
Vol 26 (6) ◽  
pp. 1155-1164
Author(s):  
Camila Fernandes Higa ◽  
Thatyanne Gradowski ◽  
Selene Elifio-Esposito ◽  
Marcelo Fernandes de Oliveira ◽  
Paulo Inforçatti ◽  
...  

Purpose This study aims to investigate the production of scaffolds by selective laser sintering (SLS) using poly(vinyl alcohol) (PVA) polymer, for in vitro studies, a relatively new and growing area in which scaffolds could be used in the design of three-dimensional models for in vitro disease model or tissue equivalent for safety and effectiveness tests. Design/methodology/approach The influence of the SLS process parameters laser power, 26 W and 32 W, and number of laser scans, 1, 2, 4 and 6, on the surface microstructure of the samples and on the degree of crystallinity and chemical stability of PVA material, was investigated using powder with particle size of 20-320 µm. Laser sintered PVA samples were subjected to cell culture tests using osteoblastic cells derived from human osteosarcoma (SaOs-2). Findings The laser power has no significant influence on the microstructure of the laser-sintered samples, however the number of scans has a considerable influence on the sintering degree; the SLS process causes a decrease in the degree of crystallinity and changes the chemical structure of the as-received PVA, especially when using higher laser power and more number of scans. Preliminary in vitro cell culture tests show that the laser-sintered PVA material is biocompatible with SaOs-2 cells. Originality/value SLS offers good potential for the fabrication of scaffolds and thus, may be applied as an alternative to conventional scaffold fabrication processes to overcome their limitations.


1995 ◽  
Vol 386 ◽  
Author(s):  
R. Mark Hall ◽  
John J. Rosato ◽  
Taura Jarvis ◽  
Thad Parry ◽  
Paul G. Lindquist

ABSTRACTThe effect of bath temperature, megasonic power, and NH4-OH:H2O ratio are studied for particle removal efficiency, surface roughness, and surface Fe concentration in SC-1 cleaning solutions. Experimental results are presented which show removal efficiencies better than 97% on bare silicon wafers for optimized process conditions. These results are related to the etch rate of thermal oxides and a model is developed for reducing surface roughness and minimizing Fe contamination levels while maximizing particle removal efficiency.


RSC Advances ◽  
2015 ◽  
Vol 5 (91) ◽  
pp. 74220-74229 ◽  
Author(s):  
Z. Abdeen ◽  
Z. F. Akl

A series of PVA/MWCNTs hydrogels were synthesized and characterized. Incorruption of MWCNTs into PVA enhanced UO22+ ions removal efficiency compared to the PVA only. UO22+ adsorption process on PVA/MWCNTs hydrogels was exothermic and spontaneous.


1986 ◽  
Vol 1 (6) ◽  
pp. 861-869 ◽  
Author(s):  
Paul D. Garrett ◽  
David T. Grubb

Sign in / Sign up

Export Citation Format

Share Document