Effects of Substrate on the Growth Characteristics of Silicon Oxide Films Deposited by Atmospheric Pressure Chemical Vapor Deposition Using Si ( OC 2 H 5 ) 4 and O 3
1998 ◽
Vol 145
(8)
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pp. 2847-2853
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Keyword(s):
2013 ◽
Vol 230
◽
pp. 245-253
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1985 ◽
Vol 3
(6)
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pp. 1604
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Keyword(s):
2007 ◽
Vol 201
(22-23)
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pp. 9378-9384
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Keyword(s):
Keyword(s):
2007 ◽
Vol 201
(22-23)
◽
pp. 8924-8930
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Keyword(s):
Keyword(s):
1995 ◽
Vol 24
(6)
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pp. 761-766
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