Kinetics of Deposition of Cu Thin Films in Supercritical Carbon Dioxide Solutions from a F-Free Copper(II) β-Diketone Complex

2009 ◽  
Vol 156 (6) ◽  
pp. H443 ◽  
Author(s):  
Masahiro Matsubara ◽  
Michiru Hirose ◽  
Kakeru Tamai ◽  
Yukihiro Shimogaki ◽  
Eiichi Kondoh
Keyword(s):  
Thin Films ◽  
Carbon Dioxide ◽  
Supercritical Carbon Dioxide ◽  
Kinetics Of ◽  
Supercritical Carbon

The Influence of Temperature and Concentration on Copper Deposition Kinetics in Supercritical Carbon Dioxide

2004 ◽  
Vol 812 ◽  
Author(s):  
Yinfeng Zong ◽  
James J. Watkins
Keyword(s):  
Carbon Dioxide ◽  
Supercritical Carbon Dioxide ◽  
Supercritical Fluids ◽  
Zero Order ◽  
Copper Deposition ◽  
Deposition Kinetics ◽  
Zero Order Kinetics ◽  
Concentration Interval ◽  
Kinetics Of ◽  
Supercritical Carbon

AbstractThe kinetics of copper deposition by the hydrogen-assisted reduction of bis(2,2,7- trimethyloctane-3,5-dionato)copper in supercritical carbon dioxide was studied as a function of temperature and precursor concentration. The growth rate was found to be as high as 31.5 nm/min. Experiments between 220 °C and 270 °C indicated an apparent activation energy of 51.9 kJ/mol. The deposition kinetics were zero order with respect to precursor at 250 °C and 134 bar and precursor concentrations between 0.016 and 0.38 wt.% in CO2. Zero order kinetics over this large concentration interval likely contributes to the exceptional step coverage obtained from Cu depositions from supercritical fluids.

scholarly journals Dynamics of polymer thin films in supercritical carbon dioxide

2002 ◽  
Vol 60 (4) ◽  
pp. 559-565 ◽  
Author(s):  
T Koga ◽  
Y.-S Seo ◽  
X Hu ◽  
K Shin ◽  
Y Zhang ◽  
...  
Keyword(s):  
Thin Films ◽  
Carbon Dioxide ◽  
Supercritical Carbon Dioxide ◽  
Polymer Thin Films ◽  
Supercritical Carbon

Preparation of nanocrystalline titania thin films by using pure and water-modified supercritical carbon dioxide

2016 ◽  
Vol 117 ◽  
pp. 289-296 ◽  
Author(s):  
Marie Sajfrtová ◽  
Marie Cerhová ◽  
Vladislav Dřínek ◽  
Stanislav Daniš ◽  
Lenka Matějová
Keyword(s):  
Thin Films ◽  
Carbon Dioxide ◽  
Supercritical Carbon Dioxide ◽  
Nanocrystalline Titania ◽  
Supercritical Carbon
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