The Influence of Temperature and Concentration on Copper Deposition Kinetics in Supercritical Carbon Dioxide

2004 ◽  
Vol 812 ◽  
Author(s):  
Yinfeng Zong ◽  
James J. Watkins

AbstractThe kinetics of copper deposition by the hydrogen-assisted reduction of bis(2,2,7- trimethyloctane-3,5-dionato)copper in supercritical carbon dioxide was studied as a function of temperature and precursor concentration. The growth rate was found to be as high as 31.5 nm/min. Experiments between 220 °C and 270 °C indicated an apparent activation energy of 51.9 kJ/mol. The deposition kinetics were zero order with respect to precursor at 250 °C and 134 bar and precursor concentrations between 0.016 and 0.38 wt.% in CO2. Zero order kinetics over this large concentration interval likely contributes to the exceptional step coverage obtained from Cu depositions from supercritical fluids.

2009 ◽  
Vol 156 (6) ◽  
pp. H443 ◽  
Author(s):  
Masahiro Matsubara ◽  
Michiru Hirose ◽  
Kakeru Tamai ◽  
Yukihiro Shimogaki ◽  
Eiichi Kondoh

2018 ◽  
Vol 135 ◽  
pp. 137-144 ◽  
Author(s):  
Ikuo Ushiki ◽  
Naoto Takahashi ◽  
Mio Koike ◽  
Yoshiyuki Sato ◽  
Shigeki Takishima ◽  
...  

Author(s):  
Bakhtier Farouk ◽  
Zhieheng Lei

The behavior of thermally induced acoustic waves generated by the rapid heating of a bounding solid wall in a closed cylindrical chamber filled with supercritical carbon dioxide is investigated numerically and experimentally. A time-dependent one-dimensional problem is considered for the numerical simulations where the supercritical fluid is contained between two parallel plates. The NIST Reference Database 12 is used to obtain the property relations for supercritical carbon dioxide. The thermally induced pressure (acoustic) waves undergo repeated reflections at the two confining walls and gradually dissipate. The numerically predicted temperature of the bulk supercritical fluid is found to increase homogeneously (the so called piston effect) within the domain. The details of generation, propagation and dissipation of thermally induced acoustic waves in supercritical fluids are presented under different heating rates. In the experiments, a resistance-capacitance circuit is used to generate a rapid temperature increase in a thin metal foil located at one end of a closed cylindrical chamber. The time-dependent pressure variation in the chamber and the temperature history at the foil are recorded by a fast response measurement system. Both the experimental and numerical studies predict similar pressure wave shapes and profiles due to rapid heating of a wall.


2001 ◽  
Vol 34 (22) ◽  
pp. 7744-7750 ◽  
Author(s):  
Chunmei Shi ◽  
Joseph M. DeSimone ◽  
Douglas J. Kiserow ◽  
George W. Roberts

2016 ◽  
Vol 852 ◽  
pp. 766-769
Author(s):  
Shi Ping Zhan ◽  
Qing Chun Qi ◽  
Qi Cheng Zhao ◽  
Shu Hua Chen ◽  
Wei Min Hou ◽  
...  

In recent years, supercritical carbon dioxide, as a green chemical solvent, is widely used. The surfactants for polymerization in supercritical fluids have become one of the important issues. This paper mainly discusses the mechanism and influence of the surfactants in supercritical carbon dioxide system. The choice and design principle of surfactants and the recent development of surfactants were introduced in detail.


2012 ◽  
Vol 66 ◽  
pp. 215-220 ◽  
Author(s):  
Duangkamol Ruen-ngam ◽  
Armando T. Quitain ◽  
Masahiro Tanaka ◽  
Mitsuru Sasaki ◽  
Motonobu Goto

2019 ◽  
Vol 805 ◽  
pp. 146-152
Author(s):  
Achmad Chafidz ◽  
Umi Rofiqah ◽  
Sumarno ◽  
Megawati ◽  
Mujtahid Kaavessina ◽  
...  

Supercritical fluids (SCFs) process can be considered as an emerging ”clean“ technology for the production of small-size particles (e.g. micron-size). Microsphere is a material in micron scale which has been widely used as adsorbent, catalyst support, and drug delivery system. For advanced application, those materials are formulated in the form of porous microspheres. There are several methods that can be used using SCFs. One of them is Solution Enhanced Dispersion by Supercritical Fluids (SEDS). This method is considered to be suitable in obtaining the porous microsphere polystyrene. In this study, polystyrene was first dissolved into toluene (polystyrene solution) at different concentrations (i.e. 3, 5, 7, 9, 11, 13, 15 wt%) and then blown/sprayed together with supercritical carbon dioxide (CO2) through co-axial nozzle with two differents annulus diameter (i.e. 3.6 mm and 4.6 mm). Co-axial nozzle consists of two concentric pipes, inner pipe and annulus. Inner pipe for polystyrene solution flow and annulus for supercritical carbon dioxide flow. The expansion of these two of fluid was done both in atmospheric condition and in pressurized precipitator (40 bar). The resulted microsphere was analyzed by using SEM (Scanning Electron Microscope) to determine morphology and average diameter of the microsphere. The SEM analysis results showe that the smaller the initial concentration of solution used, the resulted microspheres tend to be smaller and less fibrils formed. Additionally, in the pressurized precipitator, the formed microspheres size was smaller and size distribution more narrow than that of atmospheric condition. Moreover, the use of smaller annulus diameter in co-axial nozzle produced smaller microsphere size and the size distribution was more uniform.


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