Influence of Phosphorus Concentrations in a-SiN:H Gate Layer on Electron Mobility in Thin Film Transistors
2014 ◽
Vol 15
(11)
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pp. 2749-2755
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2019 ◽
Vol 6
(1)
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pp. 1901002
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2014 ◽
Vol 2
(14)
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pp. 2612-2621
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2008 ◽
Vol 55
(11)
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pp. 3001-3011
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