HfSiON High-k Layer Compatibility Study with TetraMethyl Ammonium Hydroxide (TMAH) Solution
2012 ◽
Vol 15
(5)
◽
pp. H141
◽
Keyword(s):
High K
◽
2014 ◽
Vol 229
(3)
◽
pp. 136-140
Keyword(s):
2012 ◽
Vol 30
(7)
◽
pp. 724-734
◽
2011 ◽
Vol 167
(1)
◽
pp. 328-334
◽
2001 ◽
Vol 61
(1-2)
◽
pp. 45-63
◽
Keyword(s):
2020 ◽
Vol 384
◽
pp. 120829
◽
Keyword(s):