Investigation of Thermal Atomic Layer Deposited TaAlC with Low Effective Work-Function on HfO2Dielectric Using TaCl5and TEA as Precursors

2016 ◽  
Vol 6 (1) ◽  
pp. P38-P41 ◽  
Author(s):  
Jinjuan Xiang ◽  
Xiaolei Wang ◽  
Tingting Li ◽  
Jianfeng Gao ◽  
Kai Han ◽  
...  
Keyword(s):  
Work Function ◽  
Atomic Layer ◽  
Effective Work ◽  
Effective Work Function

Effective work function tunability and interfacial reactions with underlying HfO2 layer of plasma-enhanced atomic layer deposited TaCxNy films

2008 ◽  
Vol 92 (20) ◽  
pp. 202902 ◽  
Author(s):  
Tae Joo Park ◽  
Jeong Hwan Kim ◽  
Jae Hyuck Jang ◽  
Kwang Duk Na ◽  
Cheol Seong Hwang ◽  
...  
Keyword(s):  
Work Function ◽  
Atomic Layer ◽  
Interfacial Reactions ◽  
Effective Work ◽  
Effective Work Function

The Effective Work-Function of Atomic Layer Deposited TaN Thin Film Using TBTDET Precursor and NH3 Reactant Gas

2021 ◽  
pp. 152118
Author(s):  
Minhyuk Kim ◽  
Moonsuk Choi ◽  
Juhyeon Lee ◽  
Weinan Jin ◽  
Changhwan Choi
Keyword(s):  
Thin Film ◽  
Work Function ◽  
Atomic Layer ◽  
Effective Work ◽  
Effective Work Function

Band alignment and effective work function of atomic-layer deposited VO2 and V2 O5 films on SiO2 and Al2 O3

2014 ◽  
Vol 12 (1-2) ◽  
pp. 238-241 ◽  
Author(s):  
F. Cerbu ◽  
H.-S. Chou ◽  
I. P. Radu ◽  
K. Martens ◽  
A. P. Peter ◽  
...  
Keyword(s):  
Work Function ◽  
Atomic Layer ◽  
Band Alignment ◽  
Effective Work ◽  
Effective Work Function

Effective work function of Pt, Pd, and Re on atomic layer deposited HfO2

2006 ◽  
Vol 89 (8) ◽  
pp. 082907 ◽  
Author(s):  
Diefeng Gu ◽  
Sandwip K. Dey ◽  
Prashant Majhi
Keyword(s):  
Work Function ◽  
Atomic Layer ◽  
Effective Work ◽  
Effective Work Function

Effective work function modification of atomic-layer-deposited-TaN film by capping layer

2006 ◽  
Vol 89 (3) ◽  
pp. 032113 ◽  
Author(s):  
K. Choi ◽  
H. N. Alshareef ◽  
H. C. Wen ◽  
H. Harris ◽  
H. Luan ◽  
...  
Keyword(s):  
Work Function ◽  
Atomic Layer ◽  
Capping Layer ◽  
Effective Work ◽  
Effective Work Function

Effective Work-Function Modulation by Aluminum-Ion Implantation for Metal-Gate Technology $(\hbox{Poly-Si/TiN/SiO}_{2})$

2007 ◽  
Vol 28 (12) ◽  
pp. 1089-1091 ◽  
Author(s):  
R. Singanamalla ◽  
H. Y. Yu ◽  
B. Van Daele ◽  
S. Kubicek ◽  
K. De Meyer
Keyword(s):  
Ion Implantation ◽  
Work Function ◽  
Metal Gate ◽  
Effective Work ◽  
Effective Work Function ◽  
Aluminum Ion

Investigating doping effects on high-κ metal gate stack for effective work function engineering

2013 ◽  
Vol 88 ◽  
pp. 21-26 ◽  
Author(s):  
C. Leroux ◽  
S. Baudot ◽  
M. Charbonnier ◽  
A. Van Der Geest ◽  
P. Caubet ◽  
...  
Keyword(s):  
Work Function ◽  
Metal Gate ◽  
Gate Stack ◽  
Effective Work ◽  
Effective Work Function ◽  
Doping Effects
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