Effect of Pad Groove Design on Slurry Injection Scheme during Interlayer Dielectric Chemical Mechanical Planarization

2015 ◽  
Vol 4 (7) ◽  
pp. P272-P276 ◽  
Author(s):  
C. Wu ◽  
Y. Sampurno ◽  
X. Liao ◽  
Y. Zhuang ◽  
L. Borucki ◽  
...  
Keyword(s):  
Chemical Mechanical Planarization ◽  
Interlayer Dielectric ◽  
Groove Design ◽  
Injection Scheme ◽  
Slurry Injection

scholarly journals Slurry Injection Schemes on the Extent of Slurry Mixing and Availability during Chemical Mechanical Planarization

Micromachines ◽  
2017 ◽  
Vol 8 (6) ◽  
pp. 170 ◽  
Author(s):  
Matthew Bahr ◽  
Yasa Sampurno ◽  
Ruochen Han ◽  
Ara Philipossian
Keyword(s):  
Chemical Mechanical Planarization ◽  
Slurry Injection

Analysis of A Novel Slurry Injection System in Chemical Mechanical Planarization

2011 ◽  
Vol 50 (5S1) ◽  
pp. 05EC01 ◽  
Author(s):  
Anand Meled ◽  
Yun Zhuang ◽  
Yasa Adi Sampurno ◽  
Siannie Theng ◽  
Yubo Jiao ◽  
...  
Keyword(s):  
Chemical Mechanical Planarization ◽  
Injection System ◽  
Slurry Injection

Effect of Pad Surface Micro-Texture on Removal Rate during Interlayer Dielectric Chemical Mechanical Planarization Process

2013 ◽  
Vol 52 (1R) ◽  
pp. 018001 ◽  
Author(s):  
Xiaoyan Liao ◽  
Yun Zhuang ◽  
Leonard J. Borucki ◽  
Jiang Cheng ◽  
Siannie Theng ◽  
...  
Keyword(s):  
Removal Rate ◽  
Chemical Mechanical Planarization ◽  
Interlayer Dielectric ◽  
Planarization Process

Development and Analysis of a High-Pressure Micro Jet Pad Conditioning System for Interlayer Dielectric Chemical Mechanical Planarization

2005 ◽  
Vol 44 (3) ◽  
pp. 1225-1231 ◽  
Author(s):  
Yoshiyuki Seike ◽  
Darren DeNardis ◽  
Masano Sugiyama ◽  
Keiji Miyachi ◽  
Toshiro Doi ◽  
...  
Keyword(s):  
High Pressure ◽  
Chemical Mechanical Planarization ◽  
Interlayer Dielectric ◽  
Pad Conditioning
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