Interfacial Layer Formation on Silicon by Halogen Activation
2007 ◽
Vol 42
(17)
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pp. 7343-7347
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2020 ◽
Vol 223
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pp. 111219
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2017 ◽
Vol 519
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pp. 146-152
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2012 ◽
Vol 717-720
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pp. 437-440
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