Arrayed Si/SiGe Nanowire Heterostructure Formation via Au-catalyzed Wet Chemical Etching Method

2009 ◽  
Vol 12 (5) ◽  
pp. K37 ◽  
Author(s):  
X. Wang ◽  
K. L. Pey ◽  
W. K. Choi ◽  
C. K. F. Ho ◽  
E. Fitzgerald ◽  
...  

2008 ◽  
Vol 254 (21) ◽  
pp. 6697-6700 ◽  
Author(s):  
R.T. Zhang ◽  
C.R. Yang ◽  
A. Yu ◽  
B. Wang ◽  
H.J. Tang ◽  
...  

2019 ◽  
Vol 16 (25) ◽  
pp. 147-153
Author(s):  
Xiaodong Wang ◽  
K.L. Pey ◽  
W.K. Choi ◽  
C.K.F. Ho ◽  
Eugene A. Fitzgerald ◽  
...  

Author(s):  
Dongmei Meng ◽  
Joe Rupley ◽  
Chris McMahon

Abstract This paper presents decapsulation solutions for devices bonded with Cu wire. By removing mold compound to a thin layer using a laser ablation tool, Cu wire bonded packages are decapsulated using wet chemical etching by controlling the etch time and temperature. Further, the paper investigates the possibilities of decapsulating Cu wire bonded devices using full wet chemical etches without the facilitation of laser ablation removing much of mold compound. Additional discussion on reliability concerns when evaluating Cu wirebond devices is addressed here. The lack of understanding of the reliability of Cu wire bonded packages creates a challenge to the FA engineer as they must develop techniques to help understanding the reliability issue associated with Cu wire bonding devices. More research and analysis are ongoing to develop appropriate analysis methods and techniques to support the Cu wire bonding device technology in the lab.


Small ◽  
2020 ◽  
Vol 16 (51) ◽  
pp. 2007045
Author(s):  
Mei Sun ◽  
Bocheng Yu ◽  
Mengyu Hong ◽  
Zhiwei Li ◽  
Fengjiao Lyu ◽  
...  

Author(s):  
Albert Grau-Carbonell ◽  
Sina Sadighikia ◽  
Tom A. J. Welling ◽  
Relinde J. A. van Dijk-Moes ◽  
Ramakrishna Kotni ◽  
...  

2015 ◽  
Vol 48 (36) ◽  
pp. 365303 ◽  
Author(s):  
Jingchang Sun ◽  
Ting Zhao ◽  
Zhangwei Ma ◽  
Ming Li ◽  
Cheng Chang ◽  
...  

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