Growth of Al Doped ZnO Thin Films by Atomic Layer Deposition
Process
2001 ◽
Vol 65
(1-4)
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pp. 125-132
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2018 ◽
Vol 39
(3)
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pp. 033004
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2012 ◽
Vol 30
(2)
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pp. 021202
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1997 ◽
Vol 49
(1-4)
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pp. 19-26
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2017 ◽
Vol 122
(1)
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pp. 377-385
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2007 ◽
Vol 42
(1-6)
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pp. 172-175
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2017 ◽
Vol 727
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pp. 565-571
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