Novel GIX2 Apparatus for Thin Film Analysis Using Color Laue Method

1995 ◽  
Vol 39 ◽  
pp. 171-180 ◽  
Author(s):  
Toshihisa Horiuchi ◽  
Kenji Ishida ◽  
Kouichi Hayashi ◽  
Kazumi Matsushige ◽  
Atsushi Shibata

In modern technology, thin-layered materials with layer thickness in nanometer ranges have been utilized for various advanced components such as integrated circuits, magnetic heads and disks, X-ray mirrors and coated window glasses. For the analysis of such materials, powerful probes, fluorescence(TXRF)1), diffraction(TXRD) 2-4) and reflectivity(GIXR) 5-7), formed by X-rays in conjunction with total reflection phenomena can provide important information on element composition, crystalline structure, layer thickness, electron density and interfacial roughness.

Author(s):  
D.K. Ross ◽  
R.V. Heyman ◽  
D. Elthon

Until quite recently, electron microprobe analysis techniques were limited to samples of “infinite” thickness, that is, to samples thick enough such that the entire excitation volume was contained within the material of interest. Thin film analysis was not possible with available matrix correction programs, which were based on the assumption of samples of “infinite” thickness. Now however, algorithms are available that permit analysis of thin samples.We have obtained one of the more versatile and sophisticated of these programs. In order to investigate the accuracy of this routine we have analyzed several BiSrCaCuO thin films at 15 kV and repeated the analysis at 30 kV. These films were thick enough such that at 15 kV conventional ZAF data reduction yielded acceptable totals (98-101 %) with minimal substrate x rays observed. At 30 kV, however abundant substrate x rays were observed and ZAF yielded very low totals. X-ray intensity ratios from 30 kV runs were used to estimate film thickness and matrix corrections were applied using the Waldo algorithm.


In the development of the study of crystals by X-rays the methods used divide themselves naturally into four types : the Bragg Ionisation Spectrometer method, the Laue method, the Powder method of Debye and Scherrer, and the Rotating Crystal method of Rinne, Schiebold and Polyani. The techniques of the first three of these methods are fully explained in such books as ‘ X-Rays and Crystal Structure,’ by W. H. and W. L. Bragg, ‘ The Structure of Crystals,’ by Wyckoff, and ‘ Krystalle und Rontgenstrahlen,’ by Ewald, as well as in original papers. On the other hand, the rotation method is only slightly touched on in these works, the literature is scattered in a great number of papers, and the technique has not so far been described at any length in a convenient form. Particularly in English, references to it are scanty. In this paper the author has tried to give a concise account of the method, together with various types of charts and tables as it is used in the Davy Faraday Laboratory. The methods described differ in certain respects from those used on the Continent,* but they have been found to be rapid and sufficiently accurate.


Nanoscale ◽  
2018 ◽  
Vol 10 (45) ◽  
pp. 21142-21150 ◽  
Author(s):  
John Djamil ◽  
Anna-Lena Hansen ◽  
Claudia Backes ◽  
Wolfgang Bensch ◽  
Ulrich Schürmann ◽  
...  
Keyword(s):  
X Rays ◽  

Unveiling the nanostructure of ball-milled MoS2 on different length scales by analyses of X-ray data, UV-Vis spectra and TEM images.


2021 ◽  
Vol 11 (1) ◽  
Author(s):  
Zefeng Li ◽  
Wei Zhou ◽  
Xianlong Zhang ◽  
Yue Gao ◽  
Shaoyun Guo

AbstractTo overcome the severe toxicity and blind absorption zone of conventional lead-based shielding materials for X-rays in the 70–90 keV range, the lead-free multilayered polymer composites were designed and fabricated. The effects of the direction of incidence of the X-rays and number of layers as well as layer thickness ratio of the (tungsten/ethylene-octene copolymer)/(bismuth/ethylene-octene copolymer) layered composites on their shielding efficiency were studied systematically. Compared to the traditional polymer blending, the multilayered polymer composites exhibited the improved photon attenuation. The multilayered polymer composites (layer thickness ratio was 3:7) with 6 layers had the best X-ray shielding ability. Moreover, the X-ray shielding provided by the multi-layered interfaces and the multiple complementary effect of the absorption within the multilayered structure were firstly proposed based on computer simulations. The multilayered structural design effectively weakened the probability of the X-ray penetration. Therefore, the X-ray shielding capability can be effectively enhanced through increasing number of layers and the synergistic effect of multi-layered interfaces. The experimental results of this study can serve as guidelines for the fabrication of flexibility, lead-free, lightweight and high-efficiency X-ray shielding materials.


2019 ◽  
Vol 4 (1) ◽  
pp. 13-23
Author(s):  
Peter B. Weichman ◽  
Eugene M. Lavely

AbstractThis paper summarizes approaches to image quality prediction in support of an effort under the IARPA RAVEN program to demonstrate a non-destructive, tabletop X-ray microscope for high-resolution 3D imaging of integrated circuits (ICs). The fluorescent X-rays are generated by scanning an electron beam along an appropriately patterned target layer placed in front of the sample and are then detected after passing through the sample by a high-resolution (in both solid angle and energy) backside sensor array. The images are created by way of a model-based tomographic inversion algorithm, with image resolution depending critically on the electron beam scan density and diversity of sample orientations. We derive image quality metrics that quantify the image point spread function and noise sensitivity for any proposed experiment design. Application of these metrics will guide final system design when physical data are not yet available.


2021 ◽  
Author(s):  
John True ◽  
Chengjie Xi ◽  
Aslam Khan ◽  
Josh Hihath ◽  
Navid Asadizanjani

Abstract Semiconductor manufacturing has been outsourced to un-trusted regions due to globalization. The complex multistep fabrication of micro-scale integrated circuits (ICs) and the tedious assembly of macro-scale Printed Circuit Boards (PCBs) are vulnerable to malicious attacks from design to final delivery. PCBs provide the functional connections of Integrated Circuits (ICs), sensors, power supplies, etc. of many critical electronic systems for consumers, corporations, and governments. The feature sizes of PCB signal traces in 2D and vias in 3D are an order of magnitude larger than IC devices, and are thereby more vulnerable to non-destructive attacks such as X-ray or probing. Active and passive countermeasures have been successfully developed for IC devices, however PCBs devices are difficult to wholly secure from all attacks. Passive countermeasures for X-ray attacks using high-z materials to block and scatter X-rays are effective, but there is a lack of active and passive countermeasures for PCB. In this paper, a framework for passively obfuscating a PCB's critical connections between components, such as ICs, from non-destructive attacks is demonstrated. This framework can be further extended to incorporate active countermeasures in future work. A proof of concept for a PCB electronic design automation (EDA) tool which combines the small features of micro electro-mechanical systems (MEMS), simulation of X-ray, and 3D PCB Manufacturing to iteratively optimize PCB design to thwart reverse engineering and probing attacks. Index Terms—Additive Manufacturing, MEMS, Hardware Assurance, Physical Inspection, Non-Destructive Technology


1989 ◽  
Vol 33 ◽  
pp. 75-82 ◽  
Author(s):  
M. Fatemi ◽  
S. Prokes ◽  
B. V. Shanabrook ◽  
K. L. Wang

It is well known that x-ray diffraction techniques provide one of the most direct means of analyzing superlattice periodicity, layer thickness, strain, and defect structure. This suitability of x-rays is a consequence of the fact that most superlattice periods are in the range of 10 to 50 times the typical wavelength (Cuκα=1.54 Å) and are hence measurable by x-ray diffraction, and also that x-rays are non-destructive within the energy and dosage ranges needed for these studies. Applications of x-ray techniques to supperlattices have been discussed in many publications in the open literature.


1986 ◽  
Vol 30 ◽  
pp. 315-323
Author(s):  
Tomoya Arai

The developments in the analysis of low atomic number elements or the measurements of soft and ultrasoft X-rays have been carried out. Using this technology, a measuring method for thinner layered materials has been developed recently. This type of analysis requires a high excitation and wavelength dispersive devices with high reflectivity.On the other side, the film technologies related to electronic and optical devices in the field of semiconductor industry have made a remarkable progress. A variety of layered material thickness in the multilayered structure of LSI is in the range of 100Å and 2μm. It is too thick to be measured by electron methods and too thin to be measured by a regular X-ray method using the X-ray wavelength of 0.2-3Å. Accordingly, it is generally said that the soft and ultrasoft X-ray method should be applied to measure the thickness and composition of layered materials on silicon wafers.


2020 ◽  
Author(s):  
Zefeng Li ◽  
Wei Zhou ◽  
Xianlong Zhang ◽  
Yue Gao ◽  
Shaoyun Guo

Abstract To overcome the severe toxicity and blind absorption zone of conventional lead-based shielding materials for X-rays in the 70-90 keV range, the lead-free multilayered polymer composites were designed and fabricated. The effects of the direction of incidence of the X-rays and number of layers as well as layer thickness ratio of the (tungsten/ethylene-octene copolymer)/(bismuth/ethylene-octene copolymer) layered composites on their shielding efficiency were studied systematically. Compared to the traditional polymer blending, the multilayered polymer composites exhibited the improved photon attenuation. The multilayered polymer composites (layer thickness ratio was 3:7) with 6 layers had the best X-ray shielding ability. Moreover, the X-ray shielding provided by the multi-layered interfaces and the multiple complementary effect of the absorption within the multilayered structure were firstly proposed based on computer simulations. The multilayered structural design effectively weakened the probability of the X-ray penetration. Therefore, the X-ray shielding capability can be effectively enhanced through increasing number of layers and the synergistic effect of multi-layered interfaces. The experimental results of this study can serve as guidelines for the fabrication of flexibility, lead-free, lightweight and high-efficiency X-ray shielding materials.


1994 ◽  
Vol 144 ◽  
pp. 82
Author(s):  
E. Hildner

AbstractOver the last twenty years, orbiting coronagraphs have vastly increased the amount of observational material for the whitelight corona. Spanning almost two solar cycles, and augmented by ground-based K-coronameter, emission-line, and eclipse observations, these data allow us to assess,inter alia: the typical and atypical behavior of the corona; how the corona evolves on time scales from minutes to a decade; and (in some respects) the relation between photospheric, coronal, and interplanetary features. This talk will review recent results on these three topics. A remark or two will attempt to relate the whitelight corona between 1.5 and 6 R⊙to the corona seen at lower altitudes in soft X-rays (e.g., with Yohkoh). The whitelight emission depends only on integrated electron density independent of temperature, whereas the soft X-ray emission depends upon the integral of electron density squared times a temperature function. The properties of coronal mass ejections (CMEs) will be reviewed briefly and their relationships to other solar and interplanetary phenomena will be noted.


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