scholarly journals Growth of Single-Walled Carbon Nanotubes by Plasma CVD

2010 ◽  
Vol 2010 ◽  
pp. 1-11 ◽  
Author(s):  
Toshiaki Kato ◽  
Rikizo Hatakeyama

Recent research in plasma chemical vapor deposition (CVD) for single-walled carbon nanotube (SWNT) growth has achieved low-temperature synthesis, individually freestanding formation, and structure control of diameter, chirality, and length. Detailed growth kinetics of SWNTs are revealed using a combination of techniques for plasma control and nanomaterial analysis. Plasma CVD also allows tube metallicity to be controlled by tuning the mean diameter of SWNTs. This plasma CVD progress contributes to the next stage of nanotube fabrication, which is required for practical use of SWNTs in a variety of applications.

2008 ◽  
Vol 8 (5) ◽  
pp. 2526-2533 ◽  
Author(s):  
Cheng-Hui Weng ◽  
Chao-Shun Yang ◽  
Hsuan Lin ◽  
Chuen-Horng Tsai ◽  
Keh-Chyang Leou

In this work, we present a parametric study on the low temperature synthesis of single-walled carbon nanotubes (SWNTs) in an inductively coupled plasma (ICP) CVD system using dry bi-layered catalytic thin-films (Fe/Al and Ni/Al, deposited by electron-beam evaporation method) as the catalysts. With a low substrate temperature of 550 °C and above, SWNTs were successfully synthesized on both catalysts, as revealed from the characteristic peaks of SWNTs in the micro-Raman spectra. By the reduction of plasma power and the shortening of the process times, the lowest synthesis temperature of SWNTs achieved in our system was approached to 500 °C on Ni/Al catalysts; on the other hands, the lowest temperature for Fe/Al catalysts was 550 °C. Our results suggest that as compared with Fe/Al, Ni/Al is more favorable for plasma-enhanced CVD (PECVD) synthesis of SWNTs at low temperatures. This work can be used for further improvements and better understanding on the production processes of SWNTs by PECVD methods.


2008 ◽  
Vol 8 (1) ◽  
pp. 329-334 ◽  
Author(s):  
Seung Yol Jeong ◽  
Sang Hyun Jeon ◽  
Gang Hee Han ◽  
Kay Hyeok An ◽  
Dong Jae Bae ◽  
...  

Individual single-walled carbon nanotubes (SWCNTs) were synthesized on the patterned water-soluble catalyst by thermal chemical vapor deposition. The individual SWCNTs were obtained by introducing polyvinylpyrrolidone (PVP) as a dispersant. The number of SWCNTs between two electrodes were approximately 1 ∼2 with an average diameter of about 1.7 nm and a yield of forming electrodes of nearly 70%. The PVP played an important role in dispersing catalysts and suppressing the active sites to limit the number of SWCNTs during synthesis, which is a critical condition for fabrication of field effect transistors (FETs). The measured I–V characteristics of the over layer-deposited electrodes revealed a clear gating effect in large portion, in good agreement with Raman observations in several excitation energies. The patterning procedure, catalyst preparation, and growth condition for fabrication of the SWCNT-FET were further discussed.


2004 ◽  
Vol 828 ◽  
Author(s):  
Qiang Fu ◽  
Lei An ◽  
Chenguang Lu ◽  
Jie Liu

AbstractHigh-density and high-quality single walled carbon nanotubes are directly grown on surface by Chemical Vapor Depositions. We found that those SWNT thin films could be used to fabricate thin film field-effect transistors. Those transistors are very sensitive to surface charges changes in aqueous solutions and could be used tobuild chemical sensors.


2015 ◽  
Vol 1752 ◽  
pp. 27-30
Author(s):  
Takahiro Maruyama ◽  
Hiroki Kondo ◽  
Akinari Kozawa ◽  
Takahiro Saida ◽  
Shigeya Naritsuka ◽  
...  

ABSTRACTSingle-walled carbon nanotube (SWCNT) growth from Pt catalysts by an alcohol gas source method, a type of cold-wall chemical vapor deposition (CVD), was investigated. Raman results showed that the diameters of SWCNTs grown from Pt were below 1.2 nm, while transmission electron microscopy (TEM) showed that the diameters of most Pt catalyst particles were above 1.2 nm. This suggests that SWCNT diameters were smaller than Pt catalysts particles. X-ray photoelectron spectroscopy measurements showed that reduction of Pt particles occurred during the SWCNT growth. Based on these experimental data, growth mechanism of SWCNTs was discussed.


2008 ◽  
Vol 8 (5) ◽  
pp. 2522-2525 ◽  
Author(s):  
N. Songmee ◽  
S. Daothong ◽  
P. Singjai

Single-walled carbon nanotubes (SWNTs) were grown on gold nanoparticle (GNP) coated quartz substrates by alcohol catalytic chemical vapor deposition. The GNP coated substrates were coated with Co catalyst by a dip-coat method. The growth was then carried out at 800 °C under a pressure of 10 Torr in an atmosphere of ethanol vapor for 30 min. Characterizations have shown larger SWNT diameters with higher negative temperature coefficients for GNP coated substrates as compared to those of quartz substrates without GNPs. It is attributed that SWNT-GNP hybrid structures have a higher fraction of semiconductor-type pathways.


MRS Advances ◽  
2019 ◽  
Vol 4 (3-4) ◽  
pp. 225-230
Author(s):  
Takuya Okada ◽  
Takahiro Saida ◽  
Shigeya Naritsuka ◽  
Takahiro Maruyama

Abstract:We demonstrated that single-walled carbon nanotubes (SWCNTs) grew from Ir catalysts by an alcohol catalytic chemical vapor deposition (ACCVD) method using a gas source-type CVD system. At an ethanol pressure of 1×10−1 Pa at 800°C, vertically aligned SWCNTs (VA-SWCNTs) were grown on SiO2/Si substrates. As the growth time became longer, the VA-SWCNT became thicker, and it reached almost 5 μm for a growth time of 180 min. The Raman spectroscopy results showed that the diameters of the grown SWCNTs were mainly distributed below 1.1 nm, indicating that the SWCNTs grown from Ir catalysts had small diameters compared with those from other metal catalysts.


2007 ◽  
Vol 561-565 ◽  
pp. 1205-1208
Author(s):  
Hideto Yoshida ◽  
Tetsuya Uchiyama ◽  
Jun Kikkawa ◽  
Hideo Kohno ◽  
Seiji Takeda

Single-walled carbon nanotubes (SWNTs) have been synthesized on silicon nanowires (SiNWs) by ethanol chemical vapor deposition (CVD) using Co catalysts nanoparticles. The surface SiOx layers assist the formation of catalyst nanoparticles on SiNWs by inhibiting the diffusion of Co to Si. Co-Si compounds have formed in SiNWs readily when the surface SiOx layers are very thin. Therefore, the yield of SWNTs is strongly influenced by the thickness of the surface SiOx layers of SiNWs.


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