Stacking of InAs QDs with Different Spacer Layer Thickness on GaAs Substrate by Molecular Beam Epitaxy

InAs QDs were grown by supplying 2.5 mono-layers (MLs) of InAs at 500 °C in a molecular beam epitaxial (MBE) system. The QDs are approximately 4–6 nm height with an areal density of 3×85 ×1010 cm−2 for single layer QDs. Typical diameter was found to be about 15–25 nm. InAs QDs were stacked with the spacer layer thickness of 5, 10, 15, 25 and 35 nm. For 15 nm of spacer layer thickness the QDs density decreased to 2.62×1010 cm−2 and again increased for 35 nm spacer layer and reached to the value of 3.65×1010 cm−2. The 14 K photoluminescence (PL) spectra of single layer InAs QDs covered by GaAs layer centered at 1079 nm. For the stacking of InAs QDs with spacer layer thickness of 5 and 10 nm another peak appeared around 1100 nm due to size broadening of QDs because of strain propagation to next layer due to less thickness of spacer layer. When the thickness of the spacer layer increased to 35 nm the peak position is around 1073 nm and the intensity increased more than 3 fold when compare to single layer QDs.