The Characteristics of an Antibacterial TiAgN Thin Film Coated by Physical Vapor Deposition Technique

2015 ◽  
Vol 15 (8) ◽  
pp. 6020-6023 ◽  
Author(s):  
Byeong-Mo Kang ◽  
Woon-Jo Jeong ◽  
Gye-Choon Park ◽  
Dong-Joo Yoon ◽  
Ho-Geun Ahn ◽  
...  
Keyword(s):  
Thin Film ◽  
Vapor Deposition ◽  
Physical Vapor Deposition ◽  
Deposition Technique ◽  
Vapor Deposition Technique ◽  
Physical Vapor Deposition Technique

Performance of Erbium-doped TiO2 thin film grown by physical vapor deposition technique

2017 ◽  
Vol 123 (9) ◽  
Author(s):  
Rini Lahiri ◽  
Anupam Ghosh ◽  
Shyam Murli Manohar Dhar Dwivedi ◽  
Shubhro Chakrabartty ◽  
P. Chinnamuthu ◽  
...  
Keyword(s):  
Thin Film ◽  
Vapor Deposition ◽  
Physical Vapor Deposition ◽  
Tio2 Thin Film ◽  
Deposition Technique ◽  
Doped Tio2 ◽  
Vapor Deposition Technique ◽  
Erbium Doped ◽  
Physical Vapor Deposition Technique

DEPOSITION OF THIN FILM COPPER NANOSTRUCTURES BY ELECTRON BEAM PHYSICAL VAPOR DEPOSITION TECHNIQUE ON SiO2/p-TYPE Si(100) AND STUDY OF ITS OXIDATION BEHAVIOR

2011 ◽  
Vol 25 (19) ◽  
pp. 2567-2574 ◽  
Author(s):  
M. YEGANEH ◽  
M. SAREMI
Keyword(s):  
Thin Film ◽  
Electron Beam ◽  
Integrated Circuits ◽  
Vapor Deposition ◽  
Physical Vapor Deposition ◽  
Oxidation Behavior ◽  
X Ray Diffraction ◽  
Vapor Deposition Technique ◽  
Physical Vapor Deposition Technique ◽  
P Type

Electron beam physical vapor deposition (EBPVD) is being used in coating components for many applications such as for producing nanostructures and integrated circuits (ICs) coating in electronic industry. In this work, copper was deposited on the SiO 2/p-type Si (100). Thin film characteristics are investigated by scanning electron microscopy and X-ray diffraction (XRD). Then oxidation behavior of deposits was evaluated by Dektak Surface Profiler and weight gain method at 200 and 300°C. Results showed that thin film copper deposited by EBPVD has better oxidation characteristics in comparison with copper foil.

Sign in / Sign up

Export Citation Format

Share Document